Matches in SemOpenAlex for { <https://semopenalex.org/work/W2014933137> ?p ?o ?g. }
- W2014933137 endingPage "2519" @default.
- W2014933137 startingPage "2512" @default.
- W2014933137 abstract "The paper presents an experimental study of a pulsed DC unbalanced magnetron discharge with Ti target. This system is being used for deposition of nanocrystalline TiOx thin films. The unbalanced magnetron was operated in pulsed regime with the low repetition frequency of modulation cycle νp = 250 Hz and relatively short active part of modulation cycle Ta = 150 μs. Low average discharge current was used with maximum value about 1 A. Maximum instant discharge current in the active part of modulation cycle was 20 A. Relatively high plasma density up to value ne ≈ 1018 m− 3 was achieved at these conditions but due the low average power absorbed in the plasma the heat load applied on the target and the substrate was low. Time-resolved and spatially resolved Langmuir probe diagnostics was used for the systematic and detailed experimental study of the system. Experimental conditions as the instant value of discharge current, gas pressure in the reactor, gas mixture ratio Ar/O2, etc. were varied in a broad range. The time evolutions of plasma parameters such as electron density, electron temperature, plasma potential and EEPF were determined during the modulation cycle of pulse discharge excitation." @default.
- W2014933137 created "2016-06-24" @default.
- W2014933137 creator A5021767901 @default.
- W2014933137 creator A5027608302 @default.
- W2014933137 creator A5028862520 @default.
- W2014933137 creator A5034633777 @default.
- W2014933137 creator A5037277333 @default.
- W2014933137 creator A5041432635 @default.
- W2014933137 creator A5060036957 @default.
- W2014933137 creator A5080069263 @default.
- W2014933137 date "2006-12-01" @default.
- W2014933137 modified "2023-10-18" @default.
- W2014933137 title "Time-resolved probe diagnostics of pulsed DC magnetron discharge during deposition of TiO layers" @default.
- W2014933137 cites W1481769647 @default.
- W2014933137 cites W1971319331 @default.
- W2014933137 cites W1972693880 @default.
- W2014933137 cites W1989279872 @default.
- W2014933137 cites W1989836417 @default.
- W2014933137 cites W1989877692 @default.
- W2014933137 cites W1993361798 @default.
- W2014933137 cites W2003044025 @default.
- W2014933137 cites W2004145836 @default.
- W2014933137 cites W2004982340 @default.
- W2014933137 cites W2005145730 @default.
- W2014933137 cites W2007290630 @default.
- W2014933137 cites W2010217124 @default.
- W2014933137 cites W2019736779 @default.
- W2014933137 cites W2022508831 @default.
- W2014933137 cites W2030141948 @default.
- W2014933137 cites W2041534677 @default.
- W2014933137 cites W2045297418 @default.
- W2014933137 cites W2051944828 @default.
- W2014933137 cites W2058233750 @default.
- W2014933137 cites W2062824556 @default.
- W2014933137 cites W2064888319 @default.
- W2014933137 cites W2072338475 @default.
- W2014933137 cites W2075230502 @default.
- W2014933137 cites W2083590781 @default.
- W2014933137 cites W2094067084 @default.
- W2014933137 cites W2095517292 @default.
- W2014933137 cites W2117673867 @default.
- W2014933137 cites W2153404876 @default.
- W2014933137 cites W3021865451 @default.
- W2014933137 cites W4236641648 @default.
- W2014933137 doi "https://doi.org/10.1016/j.surfcoat.2006.04.013" @default.
- W2014933137 hasPublicationYear "2006" @default.
- W2014933137 type Work @default.
- W2014933137 sameAs 2014933137 @default.
- W2014933137 citedByCount "43" @default.
- W2014933137 countsByYear W20149331372012 @default.
- W2014933137 countsByYear W20149331372013 @default.
- W2014933137 countsByYear W20149331372014 @default.
- W2014933137 countsByYear W20149331372015 @default.
- W2014933137 countsByYear W20149331372016 @default.
- W2014933137 countsByYear W20149331372017 @default.
- W2014933137 countsByYear W20149331372018 @default.
- W2014933137 countsByYear W20149331372019 @default.
- W2014933137 countsByYear W20149331372020 @default.
- W2014933137 countsByYear W20149331372021 @default.
- W2014933137 countsByYear W20149331372022 @default.
- W2014933137 countsByYear W20149331372023 @default.
- W2014933137 crossrefType "journal-article" @default.
- W2014933137 hasAuthorship W2014933137A5021767901 @default.
- W2014933137 hasAuthorship W2014933137A5027608302 @default.
- W2014933137 hasAuthorship W2014933137A5028862520 @default.
- W2014933137 hasAuthorship W2014933137A5034633777 @default.
- W2014933137 hasAuthorship W2014933137A5037277333 @default.
- W2014933137 hasAuthorship W2014933137A5041432635 @default.
- W2014933137 hasAuthorship W2014933137A5060036957 @default.
- W2014933137 hasAuthorship W2014933137A5080069263 @default.
- W2014933137 hasConcept C111368507 @default.
- W2014933137 hasConcept C113196181 @default.
- W2014933137 hasConcept C119599485 @default.
- W2014933137 hasConcept C120665830 @default.
- W2014933137 hasConcept C121332964 @default.
- W2014933137 hasConcept C123408415 @default.
- W2014933137 hasConcept C127313418 @default.
- W2014933137 hasConcept C127413603 @default.
- W2014933137 hasConcept C165801399 @default.
- W2014933137 hasConcept C169150495 @default.
- W2014933137 hasConcept C171250308 @default.
- W2014933137 hasConcept C176118016 @default.
- W2014933137 hasConcept C185592680 @default.
- W2014933137 hasConcept C19067145 @default.
- W2014933137 hasConcept C192039680 @default.
- W2014933137 hasConcept C192562407 @default.
- W2014933137 hasConcept C22175881 @default.
- W2014933137 hasConcept C22423302 @default.
- W2014933137 hasConcept C2776620479 @default.
- W2014933137 hasConcept C2777289219 @default.
- W2014933137 hasConcept C2781083372 @default.
- W2014933137 hasConcept C43503373 @default.
- W2014933137 hasConcept C43617362 @default.
- W2014933137 hasConcept C49040817 @default.
- W2014933137 hasConcept C520434653 @default.
- W2014933137 hasConcept C61427134 @default.
- W2014933137 hasConcept C62520636 @default.
- W2014933137 hasConcept C82706917 @default.