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- W2014941634 abstract "The evolution of implanted 2H profiles in single-crystal ZnO was examined as a function of annealing temperature (500–700 °C) by secondary ion mass spectrometry. The as-implanted profiles show a peak concentration of ∼2.7×1019 cm−3 at a depth of ∼0.96 μm for a dose of 1015 cm−2. Subsequent annealing causes outdiffusion of 2H from the ZnO, with the remaining hydrogen decorating the residual implant damage. Only 0.2% of the original dose is retained after annealing at 600 °C. Rutherford backscattering/channeling of samples implanted with 1H at a dose of 1016 cm−2 showed no change in backscattering yield near the ZnO surface, but did result in an increase near the end-of-range from 6.5% of the random level before 1H implantation to ∼7.8% after implantation. Results of both cathodoluminescence and photoluminescence studies show that even for a 1H dose of 1015 cm−2, the intensity of the near gap emission from ZnO is reduced more than 2 orders of magnitude from the values in unimplanted samples. This is due to the formation of effective nonradiative recombination centers associated with ion-beam-induced defects." @default.
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- W2014941634 date "2002-11-12" @default.
- W2014941634 modified "2023-10-05" @default.
- W2014941634 title "Thermal stability of ion-implanted hydrogen in ZnO" @default.
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- W2014941634 doi "https://doi.org/10.1063/1.1524033" @default.
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