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- W2014998959 abstract "We report a systematic study on the properties of light emission from two series of Si/SiNX and Si/SiO2 multilayer structures prepared by plasma enhanced chemical vapor deposition (PECVD) method. The size dependence of light emission is well exhibited when the Si sublayer thickness is thinner than 4 nm and the interface states are well passivated by hydrogen. But for the oxygen terminated Si/SiO2 multilayer structures, the oxygen modified interface states play predominant role in the properties of light emission. The evolution of the light emission properties affected by interface states was step-by-step discovered. The role of hydrogen and oxygen is discussed." @default.
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- W2014998959 date "2004-06-01" @default.
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- W2014998959 title "Comparison between light emission from Si/SiNX and Si/SiO2 multilayers: role of interface states" @default.
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- W2014998959 doi "https://doi.org/10.1016/j.jnoncrysol.2004.03.016" @default.
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