Matches in SemOpenAlex for { <https://semopenalex.org/work/W2015100455> ?p ?o ?g. }
- W2015100455 endingPage "413" @default.
- W2015100455 startingPage "407" @default.
- W2015100455 abstract "State-of-the-art devices are characterized by the occurence of large gradients in the electric field. Due to the complex doping profiles which utilize ultrashallow junctions to obtain an optimum tradeoff between short-channel effects and parasitic resistances, two-dimensional numerical simulation of these structures is mandatory. From the modeling point of view, nonlocal and quantum effects gain more and more importance which need to be properly accounted for. We review the requirements for successful numerical simulation of these semiconductor devices. In addition, we give an overview of recent activities concerning device calibration and inverse modeling since inverse modeling of the doping profile in conjunction with calibration of the model parameters has proven to be an effective method of two-dimensional doping profile extraction." @default.
- W2015100455 created "2016-06-24" @default.
- W2015100455 creator A5043510129 @default.
- W2015100455 creator A5062594496 @default.
- W2015100455 date "2002-01-01" @default.
- W2015100455 modified "2023-09-24" @default.
- W2015100455 title "Technology CAD: Device simulation and characterization" @default.
- W2015100455 cites W1965199352 @default.
- W2015100455 cites W1971155352 @default.
- W2015100455 cites W1973324357 @default.
- W2015100455 cites W1973728196 @default.
- W2015100455 cites W1973825526 @default.
- W2015100455 cites W1975099180 @default.
- W2015100455 cites W1976246102 @default.
- W2015100455 cites W1978929674 @default.
- W2015100455 cites W1985617979 @default.
- W2015100455 cites W1985657207 @default.
- W2015100455 cites W1987741902 @default.
- W2015100455 cites W1990163395 @default.
- W2015100455 cites W1991830422 @default.
- W2015100455 cites W1995656969 @default.
- W2015100455 cites W1999963969 @default.
- W2015100455 cites W2016303295 @default.
- W2015100455 cites W2017314863 @default.
- W2015100455 cites W2018728186 @default.
- W2015100455 cites W2024639443 @default.
- W2015100455 cites W2029347203 @default.
- W2015100455 cites W2038183439 @default.
- W2015100455 cites W2040095630 @default.
- W2015100455 cites W2045995066 @default.
- W2015100455 cites W2051549206 @default.
- W2015100455 cites W2055573030 @default.
- W2015100455 cites W2056292032 @default.
- W2015100455 cites W2063513484 @default.
- W2015100455 cites W2080972597 @default.
- W2015100455 cites W2088847403 @default.
- W2015100455 cites W2098395132 @default.
- W2015100455 cites W2099163406 @default.
- W2015100455 cites W2100205472 @default.
- W2015100455 cites W2106469926 @default.
- W2015100455 cites W2108317052 @default.
- W2015100455 cites W2109252247 @default.
- W2015100455 cites W2111636076 @default.
- W2015100455 cites W2115625037 @default.
- W2015100455 cites W2115698758 @default.
- W2015100455 cites W2116983885 @default.
- W2015100455 cites W2120325386 @default.
- W2015100455 cites W2128574591 @default.
- W2015100455 cites W2132738494 @default.
- W2015100455 cites W2142182294 @default.
- W2015100455 cites W2143004841 @default.
- W2015100455 cites W2143799198 @default.
- W2015100455 cites W2147832689 @default.
- W2015100455 cites W2149652685 @default.
- W2015100455 cites W2149655385 @default.
- W2015100455 cites W2150216691 @default.
- W2015100455 cites W2156770029 @default.
- W2015100455 cites W2159234731 @default.
- W2015100455 cites W2160587040 @default.
- W2015100455 cites W2166745230 @default.
- W2015100455 cites W2166841558 @default.
- W2015100455 cites W2169107966 @default.
- W2015100455 doi "https://doi.org/10.1116/1.1445162" @default.
- W2015100455 hasPublicationYear "2002" @default.
- W2015100455 type Work @default.
- W2015100455 sameAs 2015100455 @default.
- W2015100455 citedByCount "8" @default.
- W2015100455 countsByYear W20151004552012 @default.
- W2015100455 countsByYear W20151004552014 @default.
- W2015100455 crossrefType "journal-article" @default.
- W2015100455 hasAuthorship W2015100455A5043510129 @default.
- W2015100455 hasAuthorship W2015100455A5062594496 @default.
- W2015100455 hasConcept C108225325 @default.
- W2015100455 hasConcept C121332964 @default.
- W2015100455 hasConcept C127162648 @default.
- W2015100455 hasConcept C127413603 @default.
- W2015100455 hasConcept C165838908 @default.
- W2015100455 hasConcept C171250308 @default.
- W2015100455 hasConcept C192562407 @default.
- W2015100455 hasConcept C194789388 @default.
- W2015100455 hasConcept C199639397 @default.
- W2015100455 hasConcept C202444582 @default.
- W2015100455 hasConcept C207467116 @default.
- W2015100455 hasConcept C24326235 @default.
- W2015100455 hasConcept C2524010 @default.
- W2015100455 hasConcept C2779227376 @default.
- W2015100455 hasConcept C2780841128 @default.
- W2015100455 hasConcept C28719098 @default.
- W2015100455 hasConcept C33923547 @default.
- W2015100455 hasConcept C34929307 @default.
- W2015100455 hasConcept C41008148 @default.
- W2015100455 hasConcept C44154836 @default.
- W2015100455 hasConcept C49040817 @default.
- W2015100455 hasConcept C500300565 @default.
- W2015100455 hasConcept C57863236 @default.
- W2015100455 hasConcept C60799052 @default.
- W2015100455 hasConcept C62520636 @default.
- W2015100455 hasConcept C76155785 @default.