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- W2015128516 abstract "Silicon micromachining benefits from the small scale and the facility of integration with electronic circuits and sensors resulting in production of miniaturized and smart microsystems with moving parts. The dimensional scale of MEMS/MOEMS devices is immediately compatible with the size of Integrated Optics, and is appropriate to control or manipulate optical radiations. This technology is suitable to fabricate precision-defined optical components and offers easy alignment procedures of optical parts. This paper examines the contribution of micromachined structures in the specific context of optical microsensors." @default.
- W2015128516 created "2016-06-24" @default.
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- W2015128516 date "2005-09-16" @default.
- W2015128516 modified "2023-09-23" @default.
- W2015128516 title "Integrated optics and MEMS in microsensing" @default.
- W2015128516 doi "https://doi.org/10.1117/12.624494" @default.
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