Matches in SemOpenAlex for { <https://semopenalex.org/work/W2015144868> ?p ?o ?g. }
Showing items 1 to 72 of
72
with 100 items per page.
- W2015144868 abstract "Atomic force microscopy (AFM) is usually the instrument of choice for the investigation of the surface roughness of thin films. Often a detailed image and roughness analysis is hindered by tip artifacts. Many of these artifacts arise from a spatial convolution or dilation of the actual tip and the shape of the surface features imaged. Therefore a careful tip evaluation and calibration is important for a reliable roughness evaluation. In this study about a process for the fabrication of self- assembled nanometer-sized surface structures using low- energy ion sputtering of semiconductor surfaces is reported. The dimension of these structures (typically between 10 and 100 nm), the distance between them and their shape can be tuned by the parameters of the sputter process. With the help of surfaces prepared by this way the influence of the actual AFM tip quality on the measured surface topography was evaluated. Furthermore, it is shown that the tip quality has a strong influence on the parameters extracted from first- and second-order statistics of the surface roughness. This applies particularly with regard to surfaces characterized by a low surface roughness (approximately 1 nm) as generally obtained by means of thin film technologies." @default.
- W2015144868 created "2016-06-24" @default.
- W2015144868 creator A5002518288 @default.
- W2015144868 creator A5010144656 @default.
- W2015144868 creator A5056847854 @default.
- W2015144868 creator A5070761555 @default.
- W2015144868 date "2001-12-10" @default.
- W2015144868 modified "2023-09-27" @default.
- W2015144868 title "<title>AFM tip calibration using nanometer-sized structures induced by ion beam sputtering</title>" @default.
- W2015144868 doi "https://doi.org/10.1117/12.450098" @default.
- W2015144868 hasPublicationYear "2001" @default.
- W2015144868 type Work @default.
- W2015144868 sameAs 2015144868 @default.
- W2015144868 citedByCount "5" @default.
- W2015144868 crossrefType "proceedings-article" @default.
- W2015144868 hasAuthorship W2015144868A5002518288 @default.
- W2015144868 hasAuthorship W2015144868A5010144656 @default.
- W2015144868 hasAuthorship W2015144868A5056847854 @default.
- W2015144868 hasAuthorship W2015144868A5070761555 @default.
- W2015144868 hasConcept C102951782 @default.
- W2015144868 hasConcept C107365816 @default.
- W2015144868 hasConcept C120665830 @default.
- W2015144868 hasConcept C121332964 @default.
- W2015144868 hasConcept C136525101 @default.
- W2015144868 hasConcept C142724271 @default.
- W2015144868 hasConcept C159985019 @default.
- W2015144868 hasConcept C165838908 @default.
- W2015144868 hasConcept C171250308 @default.
- W2015144868 hasConcept C19067145 @default.
- W2015144868 hasConcept C192562407 @default.
- W2015144868 hasConcept C204787440 @default.
- W2015144868 hasConcept C22423302 @default.
- W2015144868 hasConcept C49040817 @default.
- W2015144868 hasConcept C62520636 @default.
- W2015144868 hasConcept C71039073 @default.
- W2015144868 hasConcept C71924100 @default.
- W2015144868 hasConcept C77066764 @default.
- W2015144868 hasConceptScore W2015144868C102951782 @default.
- W2015144868 hasConceptScore W2015144868C107365816 @default.
- W2015144868 hasConceptScore W2015144868C120665830 @default.
- W2015144868 hasConceptScore W2015144868C121332964 @default.
- W2015144868 hasConceptScore W2015144868C136525101 @default.
- W2015144868 hasConceptScore W2015144868C142724271 @default.
- W2015144868 hasConceptScore W2015144868C159985019 @default.
- W2015144868 hasConceptScore W2015144868C165838908 @default.
- W2015144868 hasConceptScore W2015144868C171250308 @default.
- W2015144868 hasConceptScore W2015144868C19067145 @default.
- W2015144868 hasConceptScore W2015144868C192562407 @default.
- W2015144868 hasConceptScore W2015144868C204787440 @default.
- W2015144868 hasConceptScore W2015144868C22423302 @default.
- W2015144868 hasConceptScore W2015144868C49040817 @default.
- W2015144868 hasConceptScore W2015144868C62520636 @default.
- W2015144868 hasConceptScore W2015144868C71039073 @default.
- W2015144868 hasConceptScore W2015144868C71924100 @default.
- W2015144868 hasConceptScore W2015144868C77066764 @default.
- W2015144868 hasLocation W20151448681 @default.
- W2015144868 hasOpenAccess W2015144868 @default.
- W2015144868 hasPrimaryLocation W20151448681 @default.
- W2015144868 hasRelatedWork W1970952973 @default.
- W2015144868 hasRelatedWork W1985465018 @default.
- W2015144868 hasRelatedWork W1991080752 @default.
- W2015144868 hasRelatedWork W1999348074 @default.
- W2015144868 hasRelatedWork W2016677740 @default.
- W2015144868 hasRelatedWork W2378202225 @default.
- W2015144868 hasRelatedWork W2380076703 @default.
- W2015144868 hasRelatedWork W2959277645 @default.
- W2015144868 hasRelatedWork W3009479340 @default.
- W2015144868 hasRelatedWork W51165433 @default.
- W2015144868 isParatext "false" @default.
- W2015144868 isRetracted "false" @default.
- W2015144868 magId "2015144868" @default.
- W2015144868 workType "article" @default.