Matches in SemOpenAlex for { <https://semopenalex.org/work/W2015176949> ?p ?o ?g. }
Showing items 1 to 92 of
92
with 100 items per page.
- W2015176949 endingPage "296" @default.
- W2015176949 startingPage "292" @default.
- W2015176949 abstract "Ion beam assisted electron cyclotron resonance plasma CVD (IB-PCVD) equipment was developed. Plasma was produced by a coaxial ECR discharge. A bucket-type ion source with a microwave plasma (MP) cathode was used as an ion source. Amorphous SiO2 films were deposited on austenitic-type stainless steel and silicon wafer substrates by use of the IB-PCVD equipment. The effects of the gas flow of monosilane, carbon dioxide and hydrogen and oxygen ion energies have been studied in the relation to composition, structure, corrosion properties and oxidation protection potential of the films. The surface morphology was observed by scanning electron microscopy. Auger spectroscopy, X-ray photoelectron spectroscopy and Fourier transform IR were used to characterize films and interface. The corrosion protection potential in an aqueous environment was evaluated by electrochemical techniques. Oxidation behaviour in the atmosphere in an oven was studied at 1000 °C. Surfaces of the films were smooth, and grain structure was not clear. These films had good corrosion protection. Oxidation of steel substrate was suppressed by the SiO2 coating. Oxygen irradiation during deposition was effective to improve corrosion and oxidation protection." @default.
- W2015176949 created "2016-06-24" @default.
- W2015176949 creator A5011918858 @default.
- W2015176949 creator A5042166922 @default.
- W2015176949 creator A5055325600 @default.
- W2015176949 creator A5077555512 @default.
- W2015176949 creator A5078885733 @default.
- W2015176949 creator A5085533649 @default.
- W2015176949 date "1995-09-01" @default.
- W2015176949 modified "2023-09-23" @default.
- W2015176949 title "SiO2 coatings produced by ion beam assisted ECR-plasma CVD" @default.
- W2015176949 cites W2008551041 @default.
- W2015176949 cites W2025608996 @default.
- W2015176949 cites W2054277783 @default.
- W2015176949 cites W2073685948 @default.
- W2015176949 doi "https://doi.org/10.1016/0257-8972(95)08304-9" @default.
- W2015176949 hasPublicationYear "1995" @default.
- W2015176949 type Work @default.
- W2015176949 sameAs 2015176949 @default.
- W2015176949 citedByCount "6" @default.
- W2015176949 countsByYear W20151769492014 @default.
- W2015176949 countsByYear W20151769492016 @default.
- W2015176949 countsByYear W20151769492018 @default.
- W2015176949 crossrefType "journal-article" @default.
- W2015176949 hasAuthorship W2015176949A5011918858 @default.
- W2015176949 hasAuthorship W2015176949A5042166922 @default.
- W2015176949 hasAuthorship W2015176949A5055325600 @default.
- W2015176949 hasAuthorship W2015176949A5077555512 @default.
- W2015176949 hasAuthorship W2015176949A5078885733 @default.
- W2015176949 hasAuthorship W2015176949A5085533649 @default.
- W2015176949 hasConcept C113196181 @default.
- W2015176949 hasConcept C121332964 @default.
- W2015176949 hasConcept C127413603 @default.
- W2015176949 hasConcept C145148216 @default.
- W2015176949 hasConcept C159985019 @default.
- W2015176949 hasConcept C175361016 @default.
- W2015176949 hasConcept C175708663 @default.
- W2015176949 hasConcept C178790620 @default.
- W2015176949 hasConcept C185544564 @default.
- W2015176949 hasConcept C185592680 @default.
- W2015176949 hasConcept C188224857 @default.
- W2015176949 hasConcept C191897082 @default.
- W2015176949 hasConcept C192562407 @default.
- W2015176949 hasConcept C20625102 @default.
- W2015176949 hasConcept C25442681 @default.
- W2015176949 hasConcept C26771246 @default.
- W2015176949 hasConcept C2781463530 @default.
- W2015176949 hasConcept C42360764 @default.
- W2015176949 hasConcept C43617362 @default.
- W2015176949 hasConcept C50774322 @default.
- W2015176949 hasConcept C93106096 @default.
- W2015176949 hasConceptScore W2015176949C113196181 @default.
- W2015176949 hasConceptScore W2015176949C121332964 @default.
- W2015176949 hasConceptScore W2015176949C127413603 @default.
- W2015176949 hasConceptScore W2015176949C145148216 @default.
- W2015176949 hasConceptScore W2015176949C159985019 @default.
- W2015176949 hasConceptScore W2015176949C175361016 @default.
- W2015176949 hasConceptScore W2015176949C175708663 @default.
- W2015176949 hasConceptScore W2015176949C178790620 @default.
- W2015176949 hasConceptScore W2015176949C185544564 @default.
- W2015176949 hasConceptScore W2015176949C185592680 @default.
- W2015176949 hasConceptScore W2015176949C188224857 @default.
- W2015176949 hasConceptScore W2015176949C191897082 @default.
- W2015176949 hasConceptScore W2015176949C192562407 @default.
- W2015176949 hasConceptScore W2015176949C20625102 @default.
- W2015176949 hasConceptScore W2015176949C25442681 @default.
- W2015176949 hasConceptScore W2015176949C26771246 @default.
- W2015176949 hasConceptScore W2015176949C2781463530 @default.
- W2015176949 hasConceptScore W2015176949C42360764 @default.
- W2015176949 hasConceptScore W2015176949C43617362 @default.
- W2015176949 hasConceptScore W2015176949C50774322 @default.
- W2015176949 hasConceptScore W2015176949C93106096 @default.
- W2015176949 hasLocation W20151769491 @default.
- W2015176949 hasOpenAccess W2015176949 @default.
- W2015176949 hasPrimaryLocation W20151769491 @default.
- W2015176949 hasRelatedWork W1978936450 @default.
- W2015176949 hasRelatedWork W1981127238 @default.
- W2015176949 hasRelatedWork W1993156593 @default.
- W2015176949 hasRelatedWork W2038979249 @default.
- W2015176949 hasRelatedWork W2044327730 @default.
- W2015176949 hasRelatedWork W2050319692 @default.
- W2015176949 hasRelatedWork W2065060970 @default.
- W2015176949 hasRelatedWork W2078541506 @default.
- W2015176949 hasRelatedWork W2092476503 @default.
- W2015176949 hasRelatedWork W2318864978 @default.
- W2015176949 hasVolume "74-75" @default.
- W2015176949 isParatext "false" @default.
- W2015176949 isRetracted "false" @default.
- W2015176949 magId "2015176949" @default.
- W2015176949 workType "article" @default.