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• W2015249241 abstract "We propose a statistical process control scheme that can be implemented in industrial practice, in which the quality of a process can be characterized by a general linear profile. We start by reviewing the general linear profile model and the existing monitoring methods. Based on this, we propose a novel multivariate exponentially weighted moving average monitoring scheme for such a profile. We introduce two other enhancement features, the variable sampling interval and the parametric diagnostic approach, to further improve the performance of the proposed scheme. Throughout the article, we use a deep reactive ion etching example from semiconductor manufacturing, which has a profile that fits a quadratic polynomial regression model well, to illustrate the implementation of the proposed approach." @default.
• W2015249241 created "2016-06-24" @default.
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• W2015249241 date "2007-11-01" @default.
• W2015249241 modified "2023-10-17" @default.
• W2015249241 title "Monitoring General Linear Profiles Using Multivariate Exponentially Weighted Moving Average Schemes" @default.
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• W2015249241 doi "https://doi.org/10.1198/004017007000000164" @default.
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