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- W2015264212 abstract "The effect of thermal reoxidation of N+-ion-implanted silicon on the SiO2-Si interface properties have been investigated. We propose that it is possible to obtain high quality insulating layers with a very low density of interface traps by employing the proper thermal reoxidation process after N+ ion implantation. Thermal reoxidation of N+-ion-implanted silicon is stopped at the early stage even at a relatively low dose of about 5 × 1015 N+ ions cm−2, which is indicative of the formation of a thin oxynitride layer. The oxynitride formation at the SiO2-Si interface by the reoxidation process has positive effects on metal-oxide-semiconductor characteristics." @default.
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- W2015264212 date "1989-10-01" @default.
- W2015264212 modified "2023-09-25" @default.
- W2015264212 title "Effect of N+ ion implantation on the oxidation of silicon and metal-oxide-semiconductor characteristics" @default.
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- W2015264212 doi "https://doi.org/10.1016/0921-5107(89)90275-4" @default.
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