Matches in SemOpenAlex for { <https://semopenalex.org/work/W2015327932> ?p ?o ?g. }
Showing items 1 to 86 of
86
with 100 items per page.
- W2015327932 abstract "Control of critical dimension (CD) variation is of extreme importance in modern semiconductor manufacturing processes. To be controlled, the nature of CD variation must be understood. This paper outlines a method for characterizing systematic spatial variation by means of dense electrical linewidth measurements, including actual sample data. In addition, since exhaustive sampling is prohibitively expensive for routine use, a method is discussed for finding an optimum economical sampling plan and using this plan to track systematic CD variation over time." @default.
- W2015327932 created "2016-06-24" @default.
- W2015327932 creator A5013076652 @default.
- W2015327932 creator A5076091266 @default.
- W2015327932 date "2003-05-27" @default.
- W2015327932 modified "2023-09-25" @default.
- W2015327932 title "Electrical linewidth metrology for systematic CD variation characterization and causal analysis" @default.
- W2015327932 cites W1572558507 @default.
- W2015327932 cites W1964955499 @default.
- W2015327932 cites W2004188318 @default.
- W2015327932 cites W2006163380 @default.
- W2015327932 cites W2057570986 @default.
- W2015327932 cites W2062901788 @default.
- W2015327932 cites W2066701048 @default.
- W2015327932 cites W2068398278 @default.
- W2015327932 cites W2101289126 @default.
- W2015327932 cites W2112204582 @default.
- W2015327932 cites W2171836507 @default.
- W2015327932 cites W2500931008 @default.
- W2015327932 doi "https://doi.org/10.1117/12.483664" @default.
- W2015327932 hasPublicationYear "2003" @default.
- W2015327932 type Work @default.
- W2015327932 sameAs 2015327932 @default.
- W2015327932 citedByCount "28" @default.
- W2015327932 countsByYear W20153279322012 @default.
- W2015327932 countsByYear W20153279322014 @default.
- W2015327932 countsByYear W20153279322015 @default.
- W2015327932 countsByYear W20153279322017 @default.
- W2015327932 countsByYear W20153279322021 @default.
- W2015327932 countsByYear W20153279322022 @default.
- W2015327932 crossrefType "proceedings-article" @default.
- W2015327932 hasAuthorship W2015327932A5013076652 @default.
- W2015327932 hasAuthorship W2015327932A5076091266 @default.
- W2015327932 hasConcept C111919701 @default.
- W2015327932 hasConcept C120665830 @default.
- W2015327932 hasConcept C121332964 @default.
- W2015327932 hasConcept C140779682 @default.
- W2015327932 hasConcept C142181693 @default.
- W2015327932 hasConcept C195766429 @default.
- W2015327932 hasConcept C202444582 @default.
- W2015327932 hasConcept C2778334786 @default.
- W2015327932 hasConcept C2780841128 @default.
- W2015327932 hasConcept C33676613 @default.
- W2015327932 hasConcept C33923547 @default.
- W2015327932 hasConcept C41008148 @default.
- W2015327932 hasConcept C44870925 @default.
- W2015327932 hasConcept C520434653 @default.
- W2015327932 hasConcept C76155785 @default.
- W2015327932 hasConcept C93389723 @default.
- W2015327932 hasConcept C94915269 @default.
- W2015327932 hasConcept C98045186 @default.
- W2015327932 hasConceptScore W2015327932C111919701 @default.
- W2015327932 hasConceptScore W2015327932C120665830 @default.
- W2015327932 hasConceptScore W2015327932C121332964 @default.
- W2015327932 hasConceptScore W2015327932C140779682 @default.
- W2015327932 hasConceptScore W2015327932C142181693 @default.
- W2015327932 hasConceptScore W2015327932C195766429 @default.
- W2015327932 hasConceptScore W2015327932C202444582 @default.
- W2015327932 hasConceptScore W2015327932C2778334786 @default.
- W2015327932 hasConceptScore W2015327932C2780841128 @default.
- W2015327932 hasConceptScore W2015327932C33676613 @default.
- W2015327932 hasConceptScore W2015327932C33923547 @default.
- W2015327932 hasConceptScore W2015327932C41008148 @default.
- W2015327932 hasConceptScore W2015327932C44870925 @default.
- W2015327932 hasConceptScore W2015327932C520434653 @default.
- W2015327932 hasConceptScore W2015327932C76155785 @default.
- W2015327932 hasConceptScore W2015327932C93389723 @default.
- W2015327932 hasConceptScore W2015327932C94915269 @default.
- W2015327932 hasConceptScore W2015327932C98045186 @default.
- W2015327932 hasLocation W20153279321 @default.
- W2015327932 hasOpenAccess W2015327932 @default.
- W2015327932 hasPrimaryLocation W20153279321 @default.
- W2015327932 hasRelatedWork W1973256291 @default.
- W2015327932 hasRelatedWork W1980116946 @default.
- W2015327932 hasRelatedWork W1994501859 @default.
- W2015327932 hasRelatedWork W2038052604 @default.
- W2015327932 hasRelatedWork W2051924923 @default.
- W2015327932 hasRelatedWork W2057404110 @default.
- W2015327932 hasRelatedWork W2067237785 @default.
- W2015327932 hasRelatedWork W2072455275 @default.
- W2015327932 hasRelatedWork W2361712220 @default.
- W2015327932 hasRelatedWork W2364903803 @default.
- W2015327932 isParatext "false" @default.
- W2015327932 isRetracted "false" @default.
- W2015327932 magId "2015327932" @default.
- W2015327932 workType "article" @default.