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- W2015455197 abstract "A method based on Nanoimprint lithography is proposed to manufacture linear encoders in the microscale range. A phase scale and a read head were manufactured by pattern transfer on silicon and pyrex, respectively. The developed process points out that this technology may be suitable for mass produced encoders with very high resolution and/or accuracy in the microscale as well as in the nanoscale range." @default.
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- W2015455197 date "2006-04-01" @default.
- W2015455197 modified "2023-10-13" @default.
- W2015455197 title "Linear optical encoders manufactured by imprint lithography" @default.
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- W2015455197 doi "https://doi.org/10.1016/j.mee.2006.01.018" @default.
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