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- W2015472743 abstract "The ideal SiC/metal contacts were formed by controlling the barrier height on the ideal SiC surface. The ideal SiC surface was realized by lowering the density of surface states owing to SiC surface hydrogenation. The mechanism of surface hydrogenation was studied in this paper. Using the surface hydrogenation treatment, SiC Schottky diodes with ideality factor of 1.2-1.25 and ohmic contacts with specific contact resistance of 5 times 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-3</sup> ~ 7 times 10 <sup xmlns:mml=http://www.w3.org/1998/Math/MathML xmlns:xlink=http://www.w3.org/1999/xlink>-3</sup> Omega cm2 were obtained below 100degC for the first time. Its advantages lay in not only avoiding the annealing at 800-1200degC for Ohmic contacts in the conventional process, but also improving the electrical performances of SiC Schottky diodes." @default.
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- W2015472743 date "2006-06-01" @default.
- W2015472743 modified "2023-09-28" @default.
- W2015472743 title "Ideal N-type SiC/metal Contacts by Reduction of the Density of Interface State" @default.
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- W2015472743 doi "https://doi.org/10.1109/icccas.2006.285237" @default.
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