Matches in SemOpenAlex for { <https://semopenalex.org/work/W2015541589> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2015541589 abstract "Exposure patterns for an optimized multiple-optical-axis PIIL system are simulated using a combination of ray tracing and Fourier analysis for several lens tilt configurations. Reasonable fidelity is shown to be possible for tilts up to 40 deg." @default.
- W2015541589 created "2016-06-24" @default.
- W2015541589 creator A5060466259 @default.
- W2015541589 creator A5079607753 @default.
- W2015541589 date "2014-01-01" @default.
- W2015541589 modified "2023-09-27" @default.
- W2015541589 title "Simulation of Multiple-Optical-Axis Pattern-Integrated Interference Lithography (PIIL) Systems" @default.
- W2015541589 cites W1965171983 @default.
- W2015541589 cites W1967934129 @default.
- W2015541589 cites W1980500777 @default.
- W2015541589 cites W1994308140 @default.
- W2015541589 cites W2145337911 @default.
- W2015541589 cites W2145598683 @default.
- W2015541589 doi "https://doi.org/10.1364/fio.2014.fw1a.3" @default.
- W2015541589 hasPublicationYear "2014" @default.
- W2015541589 type Work @default.
- W2015541589 sameAs 2015541589 @default.
- W2015541589 citedByCount "0" @default.
- W2015541589 crossrefType "proceedings-article" @default.
- W2015541589 hasAuthorship W2015541589A5060466259 @default.
- W2015541589 hasAuthorship W2015541589A5079607753 @default.
- W2015541589 hasConcept C100921725 @default.
- W2015541589 hasConcept C102519508 @default.
- W2015541589 hasConcept C111919701 @default.
- W2015541589 hasConcept C120665830 @default.
- W2015541589 hasConcept C121332964 @default.
- W2015541589 hasConcept C121483023 @default.
- W2015541589 hasConcept C127162648 @default.
- W2015541589 hasConcept C127413603 @default.
- W2015541589 hasConcept C138673069 @default.
- W2015541589 hasConcept C15336307 @default.
- W2015541589 hasConcept C191711199 @default.
- W2015541589 hasConcept C192562407 @default.
- W2015541589 hasConcept C204223013 @default.
- W2015541589 hasConcept C2779844322 @default.
- W2015541589 hasConcept C32022120 @default.
- W2015541589 hasConcept C3756478 @default.
- W2015541589 hasConcept C41008148 @default.
- W2015541589 hasConcept C62520636 @default.
- W2015541589 hasConcept C76155785 @default.
- W2015541589 hasConcept C78519656 @default.
- W2015541589 hasConceptScore W2015541589C100921725 @default.
- W2015541589 hasConceptScore W2015541589C102519508 @default.
- W2015541589 hasConceptScore W2015541589C111919701 @default.
- W2015541589 hasConceptScore W2015541589C120665830 @default.
- W2015541589 hasConceptScore W2015541589C121332964 @default.
- W2015541589 hasConceptScore W2015541589C121483023 @default.
- W2015541589 hasConceptScore W2015541589C127162648 @default.
- W2015541589 hasConceptScore W2015541589C127413603 @default.
- W2015541589 hasConceptScore W2015541589C138673069 @default.
- W2015541589 hasConceptScore W2015541589C15336307 @default.
- W2015541589 hasConceptScore W2015541589C191711199 @default.
- W2015541589 hasConceptScore W2015541589C192562407 @default.
- W2015541589 hasConceptScore W2015541589C204223013 @default.
- W2015541589 hasConceptScore W2015541589C2779844322 @default.
- W2015541589 hasConceptScore W2015541589C32022120 @default.
- W2015541589 hasConceptScore W2015541589C3756478 @default.
- W2015541589 hasConceptScore W2015541589C41008148 @default.
- W2015541589 hasConceptScore W2015541589C62520636 @default.
- W2015541589 hasConceptScore W2015541589C76155785 @default.
- W2015541589 hasConceptScore W2015541589C78519656 @default.
- W2015541589 hasLocation W20155415891 @default.
- W2015541589 hasOpenAccess W2015541589 @default.
- W2015541589 hasPrimaryLocation W20155415891 @default.
- W2015541589 hasRelatedWork W1490769996 @default.
- W2015541589 hasRelatedWork W1982238133 @default.
- W2015541589 hasRelatedWork W2003255818 @default.
- W2015541589 hasRelatedWork W2010342973 @default.
- W2015541589 hasRelatedWork W2039543340 @default.
- W2015541589 hasRelatedWork W2041277339 @default.
- W2015541589 hasRelatedWork W2065998444 @default.
- W2015541589 hasRelatedWork W2075829120 @default.
- W2015541589 hasRelatedWork W2078491312 @default.
- W2015541589 hasRelatedWork W2786686679 @default.
- W2015541589 hasRelatedWork W2883022033 @default.
- W2015541589 hasRelatedWork W2911742620 @default.
- W2015541589 hasRelatedWork W3005955219 @default.
- W2015541589 hasRelatedWork W3008561245 @default.
- W2015541589 hasRelatedWork W3014850320 @default.
- W2015541589 hasRelatedWork W3181382471 @default.
- W2015541589 hasRelatedWork W50050602 @default.
- W2015541589 hasRelatedWork W2857952541 @default.
- W2015541589 hasRelatedWork W2929490988 @default.
- W2015541589 hasRelatedWork W2962425772 @default.
- W2015541589 isParatext "false" @default.
- W2015541589 isRetracted "false" @default.
- W2015541589 magId "2015541589" @default.
- W2015541589 workType "article" @default.