Matches in SemOpenAlex for { <https://semopenalex.org/work/W2015590708> ?p ?o ?g. }
- W2015590708 endingPage "094101" @default.
- W2015590708 startingPage "094101" @default.
- W2015590708 abstract "An approach for the preparation of homogenous SrTiO3 (STO) thin films with unprecedented compositional control is presented. Nanolaminates of SrO and TiO2 were deposited at 300 °C by atomic layer deposition on bare silicon, as well as on ruthenium electrodes using metalorganic precursors [Ti(NEtMe)4 (TEMATi),Sr(iPr3Cp)2 (AbsoluteSr)]. Care was taken that the individual sublayers were grown with a number of subcycles well in the steady-state growth regime. This enabled linear composition tuning with the Sr:Ti pulse ratio, which is beneficial for process control. Still, a substrate-specific growth behavior was observed for the individual precursors leading to different cycle ratio/composition dependence for samples grown on Si as compared to Ru substrates. This could be attributed to specific nucleation conditions, which are most pronounced for the initial cycle, but also prevail throughout the film. The as-deposited layers are well separated and the sublayers are amorphous. Subsequent furnace-annealing generated polycrystalline cubic STO films, but also caused a severe distortion of the metal electrode/STO stack, due to interdiffusion. The latter was suppressed by optimized rapid thermal crystallization anneals." @default.
- W2015590708 created "2016-06-24" @default.
- W2015590708 creator A5008860995 @default.
- W2015590708 creator A5010832704 @default.
- W2015590708 creator A5023332632 @default.
- W2015590708 creator A5026761845 @default.
- W2015590708 creator A5045538982 @default.
- W2015590708 creator A5063688527 @default.
- W2015590708 creator A5065620521 @default.
- W2015590708 creator A5086492126 @default.
- W2015590708 date "2011-05-01" @default.
- W2015590708 modified "2023-09-26" @default.
- W2015590708 title "Synthesis of SrTiO<sub>3</sub> by crystallization of SrO/TiO<sub>2</sub> superlattices prepared by atomic layer deposition" @default.
- W2015590708 cites W1510147627 @default.
- W2015590708 cites W1518450637 @default.
- W2015590708 cites W1651405852 @default.
- W2015590708 cites W1971362453 @default.
- W2015590708 cites W1976568552 @default.
- W2015590708 cites W1987152091 @default.
- W2015590708 cites W1988330685 @default.
- W2015590708 cites W1995191254 @default.
- W2015590708 cites W1997616097 @default.
- W2015590708 cites W2012426704 @default.
- W2015590708 cites W2027270416 @default.
- W2015590708 cites W2038473518 @default.
- W2015590708 cites W2058273255 @default.
- W2015590708 cites W2065236908 @default.
- W2015590708 cites W2071732828 @default.
- W2015590708 cites W2080930420 @default.
- W2015590708 cites W2088925603 @default.
- W2015590708 doi "https://doi.org/10.1063/1.3573513" @default.
- W2015590708 hasPublicationYear "2011" @default.
- W2015590708 type Work @default.
- W2015590708 sameAs 2015590708 @default.
- W2015590708 citedByCount "14" @default.
- W2015590708 countsByYear W20155907082012 @default.
- W2015590708 countsByYear W20155907082013 @default.
- W2015590708 countsByYear W20155907082014 @default.
- W2015590708 countsByYear W20155907082015 @default.
- W2015590708 countsByYear W20155907082017 @default.
- W2015590708 countsByYear W20155907082018 @default.
- W2015590708 countsByYear W20155907082019 @default.
- W2015590708 countsByYear W20155907082021 @default.
- W2015590708 crossrefType "journal-article" @default.
- W2015590708 hasAuthorship W2015590708A5008860995 @default.
- W2015590708 hasAuthorship W2015590708A5010832704 @default.
- W2015590708 hasAuthorship W2015590708A5023332632 @default.
- W2015590708 hasAuthorship W2015590708A5026761845 @default.
- W2015590708 hasAuthorship W2015590708A5045538982 @default.
- W2015590708 hasAuthorship W2015590708A5063688527 @default.
- W2015590708 hasAuthorship W2015590708A5065620521 @default.
- W2015590708 hasAuthorship W2015590708A5086492126 @default.
- W2015590708 hasConcept C105382558 @default.
- W2015590708 hasConcept C113196181 @default.
- W2015590708 hasConcept C127413603 @default.
- W2015590708 hasConcept C137637335 @default.
- W2015590708 hasConcept C171250308 @default.
- W2015590708 hasConcept C178790620 @default.
- W2015590708 hasConcept C185592680 @default.
- W2015590708 hasConcept C19067145 @default.
- W2015590708 hasConcept C191897082 @default.
- W2015590708 hasConcept C192562407 @default.
- W2015590708 hasConcept C203036418 @default.
- W2015590708 hasConcept C2777855556 @default.
- W2015590708 hasConcept C42360764 @default.
- W2015590708 hasConcept C43617362 @default.
- W2015590708 hasConcept C49040817 @default.
- W2015590708 hasConcept C544956773 @default.
- W2015590708 hasConcept C56052488 @default.
- W2015590708 hasConcept C61048295 @default.
- W2015590708 hasConcept C69544855 @default.
- W2015590708 hasConcept C8010536 @default.
- W2015590708 hasConceptScore W2015590708C105382558 @default.
- W2015590708 hasConceptScore W2015590708C113196181 @default.
- W2015590708 hasConceptScore W2015590708C127413603 @default.
- W2015590708 hasConceptScore W2015590708C137637335 @default.
- W2015590708 hasConceptScore W2015590708C171250308 @default.
- W2015590708 hasConceptScore W2015590708C178790620 @default.
- W2015590708 hasConceptScore W2015590708C185592680 @default.
- W2015590708 hasConceptScore W2015590708C19067145 @default.
- W2015590708 hasConceptScore W2015590708C191897082 @default.
- W2015590708 hasConceptScore W2015590708C192562407 @default.
- W2015590708 hasConceptScore W2015590708C203036418 @default.
- W2015590708 hasConceptScore W2015590708C2777855556 @default.
- W2015590708 hasConceptScore W2015590708C42360764 @default.
- W2015590708 hasConceptScore W2015590708C43617362 @default.
- W2015590708 hasConceptScore W2015590708C49040817 @default.
- W2015590708 hasConceptScore W2015590708C544956773 @default.
- W2015590708 hasConceptScore W2015590708C56052488 @default.
- W2015590708 hasConceptScore W2015590708C61048295 @default.
- W2015590708 hasConceptScore W2015590708C69544855 @default.
- W2015590708 hasConceptScore W2015590708C8010536 @default.
- W2015590708 hasIssue "9" @default.
- W2015590708 hasLocation W20155907081 @default.
- W2015590708 hasOpenAccess W2015590708 @default.
- W2015590708 hasPrimaryLocation W20155907081 @default.
- W2015590708 hasRelatedWork W2001410052 @default.
- W2015590708 hasRelatedWork W2050061629 @default.