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W2015638862 endingPage "784" @default.
W2015638862 startingPage "779" @default.
W2015638862 abstract "Titanium oxide (TiO2) thin films were grown on Si(100) substrates using the chemical vapor deposition (CVD) of titanium tetra isopropoxide (TTIP; Ti(OCH(CH3)2)4). The distribution of the growth rate in the reactor and the step coverage of films grown in the range 593–1173 K could was using our “simple reaction model.” The TTIP changed into TiO2 directly via a surface reaction. The surface reaction rate constant was determined by comparing the step coverage of grown and simulated films. The activation energy of the surface reaction was 212 kJ/mol (T < 710 K)." @default.
W2015638862 created "2016-06-24" @default.
W2015638862 creator A5003164918 @default.
W2015638862 creator A5035727388 @default.
W2015638862 creator A5062378145 @default.
W2015638862 date "2008-01-01" @default.
W2015638862 modified "2023-10-07" @default.
W2015638862 title "Modeling Titanium Oxide Growth by Chemical Vapor Deposition Using Titanium Tetra Isopropoxide" @default.
W2015638862 cites W1966127711 @default.
W2015638862 cites W1973520769 @default.
W2015638862 cites W2000551066 @default.
W2015638862 cites W2003547757 @default.
W2015638862 cites W2005752217 @default.
W2015638862 cites W2011378639 @default.
W2015638862 cites W2014945627 @default.
W2015638862 cites W2033671984 @default.
W2015638862 cites W2041572637 @default.
W2015638862 cites W2042492216 @default.
W2015638862 cites W2051454897 @default.
W2015638862 cites W2061595129 @default.
W2015638862 cites W2083714161 @default.
W2015638862 cites W2088466857 @default.
W2015638862 cites W2260830809 @default.
W2015638862 cites W2314846908 @default.
W2015638862 cites W3141939363 @default.
W2015638862 doi "https://doi.org/10.1252/jcej.07we118" @default.
W2015638862 hasPublicationYear "2008" @default.
W2015638862 type Work @default.
W2015638862 sameAs 2015638862 @default.
W2015638862 citedByCount "4" @default.
W2015638862 countsByYear W20156388622014 @default.
W2015638862 crossrefType "journal-article" @default.
W2015638862 hasAuthorship W2015638862A5003164918 @default.
W2015638862 hasAuthorship W2015638862A5035727388 @default.
W2015638862 hasAuthorship W2015638862A5062378145 @default.
W2015638862 hasConcept C113196181 @default.
W2015638862 hasConcept C121332964 @default.
W2015638862 hasConcept C127413603 @default.
W2015638862 hasConcept C147789679 @default.
W2015638862 hasConcept C148898269 @default.
W2015638862 hasConcept C151730666 @default.
W2015638862 hasConcept C155647269 @default.
W2015638862 hasConcept C166524527 @default.
W2015638862 hasConcept C171250308 @default.
W2015638862 hasConcept C178790620 @default.
W2015638862 hasConcept C179104552 @default.
W2015638862 hasConcept C185592680 @default.
W2015638862 hasConcept C19067145 @default.
W2015638862 hasConcept C191897082 @default.
W2015638862 hasConcept C192562407 @default.
W2015638862 hasConcept C2777873363 @default.
W2015638862 hasConcept C2779851234 @default.
W2015638862 hasConcept C2816523 @default.
W2015638862 hasConcept C42360764 @default.
W2015638862 hasConcept C506065880 @default.
W2015638862 hasConcept C57410435 @default.
W2015638862 hasConcept C62520636 @default.
W2015638862 hasConcept C64297162 @default.
W2015638862 hasConcept C86803240 @default.
W2015638862 hasConcept C93391505 @default.
W2015638862 hasConcept C95121573 @default.
W2015638862 hasConceptScore W2015638862C113196181 @default.
W2015638862 hasConceptScore W2015638862C121332964 @default.
W2015638862 hasConceptScore W2015638862C127413603 @default.
W2015638862 hasConceptScore W2015638862C147789679 @default.
W2015638862 hasConceptScore W2015638862C148898269 @default.
W2015638862 hasConceptScore W2015638862C151730666 @default.
W2015638862 hasConceptScore W2015638862C155647269 @default.
W2015638862 hasConceptScore W2015638862C166524527 @default.
W2015638862 hasConceptScore W2015638862C171250308 @default.
W2015638862 hasConceptScore W2015638862C178790620 @default.
W2015638862 hasConceptScore W2015638862C179104552 @default.
W2015638862 hasConceptScore W2015638862C185592680 @default.
W2015638862 hasConceptScore W2015638862C19067145 @default.
W2015638862 hasConceptScore W2015638862C191897082 @default.
W2015638862 hasConceptScore W2015638862C192562407 @default.
W2015638862 hasConceptScore W2015638862C2777873363 @default.
W2015638862 hasConceptScore W2015638862C2779851234 @default.
W2015638862 hasConceptScore W2015638862C2816523 @default.
W2015638862 hasConceptScore W2015638862C42360764 @default.
W2015638862 hasConceptScore W2015638862C506065880 @default.
W2015638862 hasConceptScore W2015638862C57410435 @default.
W2015638862 hasConceptScore W2015638862C62520636 @default.
W2015638862 hasConceptScore W2015638862C64297162 @default.
W2015638862 hasConceptScore W2015638862C86803240 @default.
W2015638862 hasConceptScore W2015638862C93391505 @default.
W2015638862 hasConceptScore W2015638862C95121573 @default.
W2015638862 hasIssue "8" @default.
W2015638862 hasLocation W20156388621 @default.
W2015638862 hasOpenAccess W2015638862 @default.
W2015638862 hasPrimaryLocation W20156388621 @default.
W2015638862 hasRelatedWork W180596834 @default.
W2015638862 hasRelatedWork W2086791793 @default.
W2015638862 hasRelatedWork W2333720888 @default.
W2015638862 hasRelatedWork W2354696793 @default.
W2015638862 hasRelatedWork W2358643292 @default.
W2015638862 hasRelatedWork W2361776541 @default.
W2015638862 hasRelatedWork W2386990292 @default.