Matches in SemOpenAlex for { <https://semopenalex.org/work/W2015647670> ?p ?o ?g. }
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97
with 100 items per page.
- W2015647670 endingPage "280" @default.
- W2015647670 startingPage "271" @default.
- W2015647670 abstract "Ablation of single and arrayed microstructures using an excimer laser is studied. The single feature microstructures are fabricated for evaluating the ablation mechanism, threshold fluence, and associated material removing (ablation) rate. The morphology changes during ablation are investigated with the focus on the formation of the ablation defects, debris or recast. The possibility of removing these defects is also evaluated and demonstrated. The present study concentrates on the borosilicate glass, although ablation of polyimide and silicon are performed and discussed for comparison. Polyimide and silicon are the most popular polymer or semiconductor material used in the electronics industry. The arrayed microstructures are ablated to demonstrate the fact that, by repetition of a simple-patterned mask associated with synchronized laser pulses and substrate movement, arrayed and more complex structures can be cost-effectively manufactured. The potential applications of these arrayed microstructures are discussed and illustrated. A low-cost replication technique that uses the arrayed microstructure presently machined as the forming mold for making electroforming nickel microneedles is specifically presented. Finally, the potential areas of using excimer laser in micromachining of glass-based structures for future research are also briefly covered." @default.
- W2015647670 created "2016-06-24" @default.
- W2015647670 creator A5030326916 @default.
- W2015647670 creator A5042521525 @default.
- W2015647670 creator A5044466833 @default.
- W2015647670 creator A5066890787 @default.
- W2015647670 date "2005-06-01" @default.
- W2015647670 modified "2023-10-18" @default.
- W2015647670 title "Projection ablation of glass-based single and arrayed microstructures using excimer laser" @default.
- W2015647670 cites W1976907625 @default.
- W2015647670 cites W1978406321 @default.
- W2015647670 cites W1978811046 @default.
- W2015647670 cites W1990750338 @default.
- W2015647670 cites W2007995971 @default.
- W2015647670 cites W2010301198 @default.
- W2015647670 cites W2027191600 @default.
- W2015647670 cites W2034172792 @default.
- W2015647670 cites W2046406346 @default.
- W2015647670 cites W2051434206 @default.
- W2015647670 cites W2058691379 @default.
- W2015647670 cites W2066599656 @default.
- W2015647670 cites W2068845765 @default.
- W2015647670 cites W2080522994 @default.
- W2015647670 cites W2095932123 @default.
- W2015647670 cites W2538779299 @default.
- W2015647670 cites W4247222402 @default.
- W2015647670 cites W2129488283 @default.
- W2015647670 doi "https://doi.org/10.1016/j.optlastec.2004.04.007" @default.
- W2015647670 hasPublicationYear "2005" @default.
- W2015647670 type Work @default.
- W2015647670 sameAs 2015647670 @default.
- W2015647670 citedByCount "16" @default.
- W2015647670 countsByYear W20156476702014 @default.
- W2015647670 countsByYear W20156476702015 @default.
- W2015647670 countsByYear W20156476702016 @default.
- W2015647670 countsByYear W20156476702017 @default.
- W2015647670 countsByYear W20156476702019 @default.
- W2015647670 countsByYear W20156476702021 @default.
- W2015647670 countsByYear W20156476702022 @default.
- W2015647670 crossrefType "journal-article" @default.
- W2015647670 hasAuthorship W2015647670A5030326916 @default.
- W2015647670 hasAuthorship W2015647670A5042521525 @default.
- W2015647670 hasAuthorship W2015647670A5044466833 @default.
- W2015647670 hasAuthorship W2015647670A5066890787 @default.
- W2015647670 hasConcept C11413529 @default.
- W2015647670 hasConcept C120665830 @default.
- W2015647670 hasConcept C121332964 @default.
- W2015647670 hasConcept C126322002 @default.
- W2015647670 hasConcept C159985019 @default.
- W2015647670 hasConcept C192562407 @default.
- W2015647670 hasConcept C2778902805 @default.
- W2015647670 hasConcept C2779188808 @default.
- W2015647670 hasConcept C2780477314 @default.
- W2015647670 hasConcept C41008148 @default.
- W2015647670 hasConcept C49040817 @default.
- W2015647670 hasConcept C520434653 @default.
- W2015647670 hasConcept C57493831 @default.
- W2015647670 hasConcept C71924100 @default.
- W2015647670 hasConcept C74561354 @default.
- W2015647670 hasConcept C87976508 @default.
- W2015647670 hasConceptScore W2015647670C11413529 @default.
- W2015647670 hasConceptScore W2015647670C120665830 @default.
- W2015647670 hasConceptScore W2015647670C121332964 @default.
- W2015647670 hasConceptScore W2015647670C126322002 @default.
- W2015647670 hasConceptScore W2015647670C159985019 @default.
- W2015647670 hasConceptScore W2015647670C192562407 @default.
- W2015647670 hasConceptScore W2015647670C2778902805 @default.
- W2015647670 hasConceptScore W2015647670C2779188808 @default.
- W2015647670 hasConceptScore W2015647670C2780477314 @default.
- W2015647670 hasConceptScore W2015647670C41008148 @default.
- W2015647670 hasConceptScore W2015647670C49040817 @default.
- W2015647670 hasConceptScore W2015647670C520434653 @default.
- W2015647670 hasConceptScore W2015647670C57493831 @default.
- W2015647670 hasConceptScore W2015647670C71924100 @default.
- W2015647670 hasConceptScore W2015647670C74561354 @default.
- W2015647670 hasConceptScore W2015647670C87976508 @default.
- W2015647670 hasIssue "4" @default.
- W2015647670 hasLocation W20156476701 @default.
- W2015647670 hasOpenAccess W2015647670 @default.
- W2015647670 hasPrimaryLocation W20156476701 @default.
- W2015647670 hasRelatedWork W1963499153 @default.
- W2015647670 hasRelatedWork W1971426831 @default.
- W2015647670 hasRelatedWork W1979361702 @default.
- W2015647670 hasRelatedWork W1982812918 @default.
- W2015647670 hasRelatedWork W1990722140 @default.
- W2015647670 hasRelatedWork W2002905209 @default.
- W2015647670 hasRelatedWork W2030099994 @default.
- W2015647670 hasRelatedWork W2034445970 @default.
- W2015647670 hasRelatedWork W3216882649 @default.
- W2015647670 hasRelatedWork W4312569082 @default.
- W2015647670 hasVolume "37" @default.
- W2015647670 isParatext "false" @default.
- W2015647670 isRetracted "false" @default.
- W2015647670 magId "2015647670" @default.
- W2015647670 workType "article" @default.