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- W2015665143 endingPage "731" @default.
- W2015665143 startingPage "728" @default.
- W2015665143 abstract "The piezoresistive properties of strain gauges fabricated from chemical vapor deposited p-type polycrystalline diamond films were investigated. The strain gauge pattern (500 μn long × 50 μm wide) was produced on p-type polycrystalline diamond by photolithography and ion etching in an oxygen plasma, and was located at the center of a diaphragm structure (2 mm in diameter and 400 μm thick) fabricated by etching the backside of an insulating diamond/silicon substrate. The electrical resistances of the p-type diamond strain gauges decreased with increasing compressive stress applied to the diamond strain gauge by argon gas pressure. The piezoresistive gauge factors of the p-type diamond strain gauge fabricated on the diaphragm structure measured at room temperature and 200 °C were estimated to be about 1000 and about 750 over a range of 10–30 microstrains." @default.
- W2015665143 created "2016-06-24" @default.
- W2015665143 creator A5055792451 @default.
- W2015665143 creator A5065370677 @default.
- W2015665143 creator A5087888352 @default.
- W2015665143 date "1996-05-01" @default.
- W2015665143 modified "2023-10-03" @default.
- W2015665143 title "Piezoresistive properties of chemical vapor deposited p-type diamond strain gauges fabricated on diaphragm structure" @default.
- W2015665143 cites W1971187946 @default.
- W2015665143 cites W2009691758 @default.
- W2015665143 cites W2064079115 @default.
- W2015665143 cites W2066906625 @default.
- W2015665143 cites W2085729447 @default.
- W2015665143 doi "https://doi.org/10.1016/0925-9635(95)00416-5" @default.
- W2015665143 hasPublicationYear "1996" @default.
- W2015665143 type Work @default.
- W2015665143 sameAs 2015665143 @default.
- W2015665143 citedByCount "12" @default.
- W2015665143 countsByYear W20156651432013 @default.
- W2015665143 countsByYear W20156651432021 @default.
- W2015665143 crossrefType "journal-article" @default.
- W2015665143 hasAuthorship W2015665143A5055792451 @default.
- W2015665143 hasAuthorship W2015665143A5065370677 @default.
- W2015665143 hasAuthorship W2015665143A5087888352 @default.
- W2015665143 hasConcept C100460472 @default.
- W2015665143 hasConcept C136525101 @default.
- W2015665143 hasConcept C142724271 @default.
- W2015665143 hasConcept C159985019 @default.
- W2015665143 hasConcept C162882748 @default.
- W2015665143 hasConcept C192562407 @default.
- W2015665143 hasConcept C198490522 @default.
- W2015665143 hasConcept C204787440 @default.
- W2015665143 hasConcept C2776921476 @default.
- W2015665143 hasConcept C2777403436 @default.
- W2015665143 hasConcept C2779227376 @default.
- W2015665143 hasConcept C49040817 @default.
- W2015665143 hasConcept C57410435 @default.
- W2015665143 hasConcept C60584519 @default.
- W2015665143 hasConcept C71924100 @default.
- W2015665143 hasConceptScore W2015665143C100460472 @default.
- W2015665143 hasConceptScore W2015665143C136525101 @default.
- W2015665143 hasConceptScore W2015665143C142724271 @default.
- W2015665143 hasConceptScore W2015665143C159985019 @default.
- W2015665143 hasConceptScore W2015665143C162882748 @default.
- W2015665143 hasConceptScore W2015665143C192562407 @default.
- W2015665143 hasConceptScore W2015665143C198490522 @default.
- W2015665143 hasConceptScore W2015665143C204787440 @default.
- W2015665143 hasConceptScore W2015665143C2776921476 @default.
- W2015665143 hasConceptScore W2015665143C2777403436 @default.
- W2015665143 hasConceptScore W2015665143C2779227376 @default.
- W2015665143 hasConceptScore W2015665143C49040817 @default.
- W2015665143 hasConceptScore W2015665143C57410435 @default.
- W2015665143 hasConceptScore W2015665143C60584519 @default.
- W2015665143 hasConceptScore W2015665143C71924100 @default.
- W2015665143 hasIssue "6-8" @default.
- W2015665143 hasLocation W20156651431 @default.
- W2015665143 hasOpenAccess W2015665143 @default.
- W2015665143 hasPrimaryLocation W20156651431 @default.
- W2015665143 hasRelatedWork W2033744549 @default.
- W2015665143 hasRelatedWork W2037749032 @default.
- W2015665143 hasRelatedWork W2043945673 @default.
- W2015665143 hasRelatedWork W2066906625 @default.
- W2015665143 hasRelatedWork W2074666477 @default.
- W2015665143 hasRelatedWork W2078809589 @default.
- W2015665143 hasRelatedWork W2259222218 @default.
- W2015665143 hasRelatedWork W2543259275 @default.
- W2015665143 hasRelatedWork W4286696969 @default.
- W2015665143 hasRelatedWork W971734973 @default.
- W2015665143 hasVolume "5" @default.
- W2015665143 isParatext "false" @default.
- W2015665143 isRetracted "false" @default.
- W2015665143 magId "2015665143" @default.
- W2015665143 workType "article" @default.