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- W2015674310 abstract "An accurate determination of the refractive index of non-absorbing thin films was obtained for a phase thickness equal to an odd multiple of λ/4. A fact which was observed using Abeles' method is now extended to ellipsometry. It is shown here that at these phase thicknesses, errors in the model, which arise because the real systems deviate from the idealized theoretical models, are eliminated or minimized. Specifically, the model error due to slight film inhomogeneity is shown to be minimized. This observation is made using experimental data for both homogeneous and graded-index (intentionally introduced inhomogeneity) aluminium oxide thin films of various thicknesses which in turn give various phase thicknesses. Further, it is shown theoretically that the model errors can be minimized by taking measurements at these phase thicknesses in the case of films with either slight inhomogeneity or absorption." @default.
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- W2015674310 modified "2023-10-18" @default.
- W2015674310 title "The effect of phase thickness on the elimination of model errors in non-absorbing or slightly absorbing homogeneous thin films" @default.
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- W2015674310 doi "https://doi.org/10.1016/0040-6090(92)90439-i" @default.
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