FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2015674595> ?p ?o ?g. }

• W2015674595 endingPage "15755" @default.
• W2015674595 startingPage "15749" @default.
• W2015674595 abstract "Gallium nitride layers were grown by plasma-assisted molecular-beam epitaxy on (0001)-oriented sapphire substrates using an electron cyclotron resonance (ECR) and a radio frequency (rf) plasma source. An applied substrate bias was varied from -200 to +250 V, resulting in a change of the density and energy of nitrogen ions impinging the growth surface. The layers were investigated by high-resolution x-ray diffractometry and high-resolution transmission electron microscopy (HRTEM). Applying a negative bias during growth has a marked detrimental effect on the crystal perfection of the layers grown with an ECR plasma source. This is indicated by a change in shape and width of (0002) and (202ifmmodebarelsetextasciimacronfi{}5) reciprocal lattice points as monitored by triple axis x-ray measurements. In HRTEM images, isolated basal plane stacking faults were found, which probably result from precipitation of interstitial atoms. The crystal damage in layers grown with a highly negative substrate bias is comparable to that observed for ion implantation processes at orders of magnitude larger ion energies. This is attributed to the impact of ions on the growing surface. None of the described phenomena was observed for the samples grown with the rf plasma source." @default.
• W2015674595 created "2016-06-24" @default.
• W2015674595 creator A5008723666 @default.
• W2015674595 creator A5013292094 @default.
• W2015674595 creator A5030002216 @default.
• W2015674595 creator A5041211145 @default.
• W2015674595 creator A5047682614 @default.
• W2015674595 creator A5067304307 @default.
• W2015674595 creator A5091869439 @default.
• W2015674595 date "1998-12-15" @default.
• W2015674595 modified "2023-10-03" @default.
• W2015674595 title "Ion-induced crystal damage during plasma-assisted MBE growth of GaN layers" @default.
• W2015674595 cites W1965876584 @default.
• W2015674595 cites W1980743069 @default.
• W2015674595 cites W2000800859 @default.
• W2015674595 cites W2001341166 @default.
• W2015674595 cites W2004148744 @default.
• W2015674595 cites W2008098296 @default.
• W2015674595 cites W2008716272 @default.
• W2015674595 cites W2029275671 @default.
• W2015674595 cites W2039485140 @default.
• W2015674595 cites W2040541108 @default.
• W2015674595 cites W2048454557 @default.
• W2015674595 cites W2059456458 @default.
• W2015674595 cites W2076007703 @default.
• W2015674595 cites W2078021213 @default.
• W2015674595 cites W2082751909 @default.
• W2015674595 cites W2082954735 @default.
• W2015674595 cites W2087081757 @default.
• W2015674595 doi "https://doi.org/10.1103/physrevb.58.15749" @default.
• W2015674595 hasPublicationYear "1998" @default.
• W2015674595 type Work @default.
• W2015674595 sameAs 2015674595 @default.
• W2015674595 citedByCount "30" @default.
• W2015674595 countsByYear W20156745952013 @default.
• W2015674595 countsByYear W20156745952014 @default.
• W2015674595 countsByYear W20156745952015 @default.
• W2015674595 countsByYear W20156745952016 @default.
• W2015674595 countsByYear W20156745952017 @default.
• W2015674595 countsByYear W20156745952018 @default.
• W2015674595 countsByYear W20156745952019 @default.
• W2015674595 crossrefType "journal-article" @default.
• W2015674595 hasAuthorship W2015674595A5008723666 @default.
• W2015674595 hasAuthorship W2015674595A5013292094 @default.
• W2015674595 hasAuthorship W2015674595A5030002216 @default.
• W2015674595 hasAuthorship W2015674595A5041211145 @default.
• W2015674595 hasAuthorship W2015674595A5047682614 @default.
• W2015674595 hasAuthorship W2015674595A5067304307 @default.
• W2015674595 hasAuthorship W2015674595A5091869439 @default.
• W2015674595 hasConcept C100460472 @default.
• W2015674595 hasConcept C107187091 @default.
• W2015674595 hasConcept C110738630 @default.
• W2015674595 hasConcept C113196181 @default.
• W2015674595 hasConcept C120665830 @default.
• W2015674595 hasConcept C121332964 @default.
• W2015674595 hasConcept C145148216 @default.
• W2015674595 hasConcept C146088050 @default.
• W2015674595 hasConcept C161368742 @default.
• W2015674595 hasConcept C171250308 @default.
• W2015674595 hasConcept C175361016 @default.
• W2015674595 hasConcept C178790620 @default.
• W2015674595 hasConcept C184779094 @default.
• W2015674595 hasConcept C185592680 @default.
• W2015674595 hasConcept C192562407 @default.
• W2015674595 hasConcept C199360897 @default.
• W2015674595 hasConcept C2778871202 @default.
• W2015674595 hasConcept C2779227376 @default.
• W2015674595 hasConcept C2780064504 @default.
• W2015674595 hasConcept C2781285689 @default.
• W2015674595 hasConcept C3792809 @default.
• W2015674595 hasConcept C41008148 @default.
• W2015674595 hasConcept C43617362 @default.
• W2015674595 hasConcept C520434653 @default.
• W2015674595 hasConcept C62520636 @default.
• W2015674595 hasConcept C82706917 @default.
• W2015674595 hasConceptScore W2015674595C100460472 @default.
• W2015674595 hasConceptScore W2015674595C107187091 @default.
• W2015674595 hasConceptScore W2015674595C110738630 @default.
• W2015674595 hasConceptScore W2015674595C113196181 @default.
• W2015674595 hasConceptScore W2015674595C120665830 @default.
• W2015674595 hasConceptScore W2015674595C121332964 @default.
• W2015674595 hasConceptScore W2015674595C145148216 @default.
• W2015674595 hasConceptScore W2015674595C146088050 @default.
• W2015674595 hasConceptScore W2015674595C161368742 @default.
• W2015674595 hasConceptScore W2015674595C171250308 @default.
• W2015674595 hasConceptScore W2015674595C175361016 @default.
• W2015674595 hasConceptScore W2015674595C178790620 @default.
• W2015674595 hasConceptScore W2015674595C184779094 @default.
• W2015674595 hasConceptScore W2015674595C185592680 @default.
• W2015674595 hasConceptScore W2015674595C192562407 @default.
• W2015674595 hasConceptScore W2015674595C199360897 @default.
• W2015674595 hasConceptScore W2015674595C2778871202 @default.
• W2015674595 hasConceptScore W2015674595C2779227376 @default.
• W2015674595 hasConceptScore W2015674595C2780064504 @default.
• W2015674595 hasConceptScore W2015674595C2781285689 @default.
• W2015674595 hasConceptScore W2015674595C3792809 @default.
• W2015674595 hasConceptScore W2015674595C41008148 @default.
• W2015674595 hasConceptScore W2015674595C43617362 @default.

• next