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• W2015763311 endingPage "7504" @default.
• W2015763311 startingPage "7497" @default.
• W2015763311 abstract "Direct current sputtered Ti/NiV/Ag thin film metallization scheme on n+Si substrate was studied to reveal the nature of interface structure and adhesion related mechanisms. Ti/NiV/Ag scheme is usually applied when solderable backside contact is required. When thermal annealing of this sputtered metallic stack is performed below 550 °C, delamination frequently occurs. By energy dispersive X-ray spectroscopy analysis the delaminating interface was found to be between Si and Ti layer. Auger electron spectroscopy (AES) and X-ray photoelectron spectroscopy (XPS) depth profile analyses through metallic stack/Si substrate on samples exhibiting poor adhesion showed that a very thin amorphous Ti–Si phase was grown at Ti/Si interface when annealed at 400 °C. The XPS analyses of peeled layer and the surface of remained Si substrate after adhesion failure show that the delamination occurs between Si-substrate and amorphous Ti–Si layer. No contamination at Ti/Si interface was found as a possible origin for adhesion degradation. AES depth profiling of samples having good adhesion and annealed at 550 °C, revealed the formation of Ti-silicide and Ni-silicide at metal layers/Si interface, which in combination with Ni–Ti compound formed above this interface promote the adhesion." @default.
• W2015763311 created "2016-06-24" @default.
• W2015763311 creator A5040176616 @default.
• W2015763311 creator A5041828262 @default.
• W2015763311 creator A5056486952 @default.
• W2015763311 creator A5065566308 @default.
• W2015763311 date "2008-09-01" @default.
• W2015763311 modified "2023-10-17" @default.
• W2015763311 title "Structural investigation of direct current magnetron sputtered Ti/NiV/Ag layers on n+Si substrate" @default.
• W2015763311 cites W1963962888 @default.
• W2015763311 cites W1974428860 @default.
• W2015763311 cites W1975518791 @default.
• W2015763311 cites W1981230988 @default.
• W2015763311 cites W1991531847 @default.
• W2015763311 cites W1999781894 @default.
• W2015763311 cites W2008145477 @default.
• W2015763311 cites W2047782975 @default.
• W2015763311 cites W2064083185 @default.
• W2015763311 cites W2067510218 @default.
• W2015763311 cites W2093662291 @default.
• W2015763311 doi "https://doi.org/10.1016/j.tsf.2008.03.050" @default.
• W2015763311 hasPublicationYear "2008" @default.
• W2015763311 type Work @default.
• W2015763311 sameAs 2015763311 @default.
• W2015763311 citedByCount "10" @default.
• W2015763311 countsByYear W20157633112012 @default.
• W2015763311 countsByYear W20157633112013 @default.
• W2015763311 countsByYear W20157633112014 @default.
• W2015763311 countsByYear W20157633112015 @default.
• W2015763311 countsByYear W20157633112017 @default.
• W2015763311 crossrefType "journal-article" @default.
• W2015763311 hasAuthorship W2015763311A5040176616 @default.
• W2015763311 hasAuthorship W2015763311A5041828262 @default.
• W2015763311 hasAuthorship W2015763311A5056486952 @default.
• W2015763311 hasAuthorship W2015763311A5065566308 @default.
• W2015763311 hasConcept C111368507 @default.
• W2015763311 hasConcept C113196181 @default.
• W2015763311 hasConcept C121332964 @default.
• W2015763311 hasConcept C127313418 @default.
• W2015763311 hasConcept C127413603 @default.
• W2015763311 hasConcept C159985019 @default.
• W2015763311 hasConcept C171250308 @default.
• W2015763311 hasConcept C175708663 @default.
• W2015763311 hasConcept C185544564 @default.
• W2015763311 hasConcept C185592680 @default.
• W2015763311 hasConcept C19067145 @default.
• W2015763311 hasConcept C192562407 @default.
• W2015763311 hasConcept C22423302 @default.
• W2015763311 hasConcept C25442681 @default.
• W2015763311 hasConcept C2777289219 @default.
• W2015763311 hasConcept C2777855556 @default.
• W2015763311 hasConcept C2779227376 @default.
• W2015763311 hasConcept C2780901251 @default.
• W2015763311 hasConcept C42360764 @default.
• W2015763311 hasConcept C43617362 @default.
• W2015763311 hasConcept C56052488 @default.
• W2015763311 hasConcept C61427134 @default.
• W2015763311 hasConcept C8010536 @default.
• W2015763311 hasConceptScore W2015763311C111368507 @default.
• W2015763311 hasConceptScore W2015763311C113196181 @default.
• W2015763311 hasConceptScore W2015763311C121332964 @default.
• W2015763311 hasConceptScore W2015763311C127313418 @default.
• W2015763311 hasConceptScore W2015763311C127413603 @default.
• W2015763311 hasConceptScore W2015763311C159985019 @default.
• W2015763311 hasConceptScore W2015763311C171250308 @default.
• W2015763311 hasConceptScore W2015763311C175708663 @default.
• W2015763311 hasConceptScore W2015763311C185544564 @default.
• W2015763311 hasConceptScore W2015763311C185592680 @default.
• W2015763311 hasConceptScore W2015763311C19067145 @default.
• W2015763311 hasConceptScore W2015763311C192562407 @default.
• W2015763311 hasConceptScore W2015763311C22423302 @default.
• W2015763311 hasConceptScore W2015763311C25442681 @default.
• W2015763311 hasConceptScore W2015763311C2777289219 @default.
• W2015763311 hasConceptScore W2015763311C2777855556 @default.
• W2015763311 hasConceptScore W2015763311C2779227376 @default.
• W2015763311 hasConceptScore W2015763311C2780901251 @default.
• W2015763311 hasConceptScore W2015763311C42360764 @default.
• W2015763311 hasConceptScore W2015763311C43617362 @default.
• W2015763311 hasConceptScore W2015763311C56052488 @default.
• W2015763311 hasConceptScore W2015763311C61427134 @default.
• W2015763311 hasConceptScore W2015763311C8010536 @default.
• W2015763311 hasIssue "21" @default.
• W2015763311 hasLocation W20157633111 @default.
• W2015763311 hasOpenAccess W2015763311 @default.
• W2015763311 hasPrimaryLocation W20157633111 @default.
• W2015763311 hasRelatedWork W132582492 @default.
• W2015763311 hasRelatedWork W1975446518 @default.
• W2015763311 hasRelatedWork W2000251960 @default.
• W2015763311 hasRelatedWork W2034721358 @default.
• W2015763311 hasRelatedWork W2085292062 @default.
• W2015763311 hasRelatedWork W2114666858 @default.
• W2015763311 hasRelatedWork W213848383 @default.
• W2015763311 hasRelatedWork W2366815809 @default.
• W2015763311 hasRelatedWork W2790297317 @default.
• W2015763311 hasRelatedWork W4200206782 @default.
• W2015763311 hasVolume "516" @default.
• W2015763311 isParatext "false" @default.
• W2015763311 isRetracted "false" @default.

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