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- W2015793025 abstract "We have used spectroscopic ellipsometry (SE) to characterize the refractive index of AlxOy formed by lateral oxidation. Details of the wavelength dispersion of the index for AlxOy were clarified for the first time. The refractive index estimates ranged from 1.53 to 1.63 in the range of wavelengths from 1600 to 400 nm. These values are much lower than those for GaAs and AlAs. Moreover, SE made it possible to observe the thickness change of each layer before and after oxidation. These results show that we can optimize the device structure of vertical-cavity surface-emitting lasers in which AlxOy is present as a current-confinement layer or to provide distributed Bragg reflectors. This will lead to further improvements in the lasing characteristics of this type of laser." @default.
- W2015793025 created "2016-06-24" @default.
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- W2015793025 date "2002-05-15" @default.
- W2015793025 modified "2023-09-24" @default.
- W2015793025 title "Characterization of the Refractive Index of Lateral-Oxidation-Formed Al<sub><i>x</i></sub>O<sub><i>y</i></sub>by Spectroscopic Ellipsometry" @default.
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- W2015793025 doi "https://doi.org/10.1143/jjap.41.2954" @default.
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