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- W2015890702 endingPage "57" @default.
- W2015890702 startingPage "54" @default.
- W2015890702 abstract "We have developed a new type of alloyed liquid metal ion source for maskless ion implantation in III–V compound semiconductors. This ion source with alloys consisting of Pd (50), Ni (26), Si (5), Be (6), and B (13) is capable of emitting Si (n-type dopant), Be (p-type dopant), and B (device isolation) ions. Using this ion source, active regions (n-type GaAs, 2×1017/cm3) were isolated by single line implantation with a 100 keV focused B+ ion beam of 0.1 μm diam. A good isolation of submicron width (less than 0.5 μm) has been obtained. The resistivity of these isolated regions implanted with 2×1014 to 2×1015 ions/cm2 is found to be 104 to 105 Ω cm with breakdown voltages of 4 to 10 V after a heat treatment at 800 °C for 20 min. This result indicates that the submicron isolation using this technology can be maintained through the high-temperature device fabrication process." @default.
- W2015890702 created "2016-06-24" @default.
- W2015890702 creator A5019075283 @default.
- W2015890702 creator A5037026013 @default.
- W2015890702 creator A5061325568 @default.
- W2015890702 creator A5063160074 @default.
- W2015890702 date "1985-01-01" @default.
- W2015890702 modified "2023-09-25" @default.
- W2015890702 title "Formation of submicron isolation in GaAs by implanting a focused boron ion beam emitted from a Pd–Ni–Si–Be–B LM ion source" @default.
- W2015890702 doi "https://doi.org/10.1116/1.583290" @default.
- W2015890702 hasPublicationYear "1985" @default.
- W2015890702 type Work @default.
- W2015890702 sameAs 2015890702 @default.
- W2015890702 citedByCount "11" @default.
- W2015890702 crossrefType "journal-article" @default.
- W2015890702 hasAuthorship W2015890702A5019075283 @default.
- W2015890702 hasAuthorship W2015890702A5037026013 @default.
- W2015890702 hasAuthorship W2015890702A5061325568 @default.
- W2015890702 hasAuthorship W2015890702A5063160074 @default.
- W2015890702 hasConcept C108225325 @default.
- W2015890702 hasConcept C113196181 @default.
- W2015890702 hasConcept C136525101 @default.
- W2015890702 hasConcept C142724271 @default.
- W2015890702 hasConcept C145148216 @default.
- W2015890702 hasConcept C161866238 @default.
- W2015890702 hasConcept C178790620 @default.
- W2015890702 hasConcept C185592680 @default.
- W2015890702 hasConcept C188224857 @default.
- W2015890702 hasConcept C191952053 @default.
- W2015890702 hasConcept C192562407 @default.
- W2015890702 hasConcept C204787440 @default.
- W2015890702 hasConcept C41823505 @default.
- W2015890702 hasConcept C43617362 @default.
- W2015890702 hasConcept C49040817 @default.
- W2015890702 hasConcept C501308230 @default.
- W2015890702 hasConcept C50774322 @default.
- W2015890702 hasConcept C57863236 @default.
- W2015890702 hasConcept C71924100 @default.
- W2015890702 hasConceptScore W2015890702C108225325 @default.
- W2015890702 hasConceptScore W2015890702C113196181 @default.
- W2015890702 hasConceptScore W2015890702C136525101 @default.
- W2015890702 hasConceptScore W2015890702C142724271 @default.
- W2015890702 hasConceptScore W2015890702C145148216 @default.
- W2015890702 hasConceptScore W2015890702C161866238 @default.
- W2015890702 hasConceptScore W2015890702C178790620 @default.
- W2015890702 hasConceptScore W2015890702C185592680 @default.
- W2015890702 hasConceptScore W2015890702C188224857 @default.
- W2015890702 hasConceptScore W2015890702C191952053 @default.
- W2015890702 hasConceptScore W2015890702C192562407 @default.
- W2015890702 hasConceptScore W2015890702C204787440 @default.
- W2015890702 hasConceptScore W2015890702C41823505 @default.
- W2015890702 hasConceptScore W2015890702C43617362 @default.
- W2015890702 hasConceptScore W2015890702C49040817 @default.
- W2015890702 hasConceptScore W2015890702C501308230 @default.
- W2015890702 hasConceptScore W2015890702C50774322 @default.
- W2015890702 hasConceptScore W2015890702C57863236 @default.
- W2015890702 hasConceptScore W2015890702C71924100 @default.
- W2015890702 hasIssue "1" @default.
- W2015890702 hasLocation W20158907021 @default.
- W2015890702 hasOpenAccess W2015890702 @default.
- W2015890702 hasPrimaryLocation W20158907021 @default.
- W2015890702 hasRelatedWork W1239185118 @default.
- W2015890702 hasRelatedWork W1611211480 @default.
- W2015890702 hasRelatedWork W1671141714 @default.
- W2015890702 hasRelatedWork W1907800457 @default.
- W2015890702 hasRelatedWork W1966205888 @default.
- W2015890702 hasRelatedWork W1981057740 @default.
- W2015890702 hasRelatedWork W1995266869 @default.
- W2015890702 hasRelatedWork W2015890702 @default.
- W2015890702 hasRelatedWork W2036348429 @default.
- W2015890702 hasRelatedWork W3039334009 @default.
- W2015890702 hasVolume "3" @default.
- W2015890702 isParatext "false" @default.
- W2015890702 isRetracted "false" @default.
- W2015890702 magId "2015890702" @default.
- W2015890702 workType "article" @default.