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- W2015929920 abstract "Views Icon Views Article contents Figures & tables Video Audio Supplementary Data Peer Review Share Icon Share Twitter Facebook Reddit LinkedIn Tools Icon Tools Reprints and Permissions Cite Icon Cite Search Site Citation C. Lingk, M. E. Gross, W. L. Brown; X-ray diffraction pole figure evidence for (111) sidewall texture of electroplated Cu in submicron damascene trenches. Appl. Phys. Lett. 1 February 1999; 74 (5): 682–684. https://doi.org/10.1063/1.122986 Download citation file: Ris (Zotero) Reference Manager EasyBib Bookends Mendeley Papers EndNote RefWorks BibTex toolbar search Search Dropdown Menu toolbar search search input Search input auto suggest filter your search All ContentAIP Publishing PortfolioApplied Physics Letters Search Advanced Search |Citation Search" @default.
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- W2015929920 title "X-ray diffraction pole figure evidence for (111) sidewall texture of electroplated Cu in submicron damascene trenches" @default.
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