Matches in SemOpenAlex for { <https://semopenalex.org/work/W2015965417> ?p ?o ?g. }
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- W2015965417 endingPage "667" @default.
- W2015965417 startingPage "660" @default.
- W2015965417 abstract "In the surface micromachining technique, residual stress and sticking effect play an important role in determining whether a microstructure is suspended or collapse during a release process. In this paper, we propose a simpler method for making suspended membranes for thermally isolated application by using cheap processing steps and compatible with CMOS-process; also, there are some simulations done to predict stiction as function of the anchor profile. It is demonstrated by fabricating the test structures of CMOS-process compatible surface micromachined bolometer using aluminum sacrificial layer with high yield and high throughput. The aluminum sacrificial layer provides some benefits including rapid wet-etching and high wet-etching selectivity with respect to dielectric materials. The residual stress and gravity of the microstructures are evaluated with structural simulations, and the sticking effect can be alleviated by an appropriate structure design and a release process. Once the residual stress is known, we can successfully use Coventorware simulations to predict a suspended membrane by controlling the anchor profile which contains sidewall conformal factor and sidewall angle. The simulation results are in good agreement with the experiments." @default.
- W2015965417 created "2016-06-24" @default.
- W2015965417 creator A5039472183 @default.
- W2015965417 creator A5051806177 @default.
- W2015965417 creator A5075578763 @default.
- W2015965417 date "2007-03-01" @default.
- W2015965417 modified "2023-10-18" @default.
- W2015965417 title "Design of low-temperature CMOS-process compatible membrane fabricated with sacrificial aluminum layer for thermally isolated applications" @default.
- W2015965417 cites W1555969351 @default.
- W2015965417 cites W1972036137 @default.
- W2015965417 cites W2071897552 @default.
- W2015965417 cites W2078082958 @default.
- W2015965417 cites W2105661592 @default.
- W2015965417 cites W2117160279 @default.
- W2015965417 cites W2118166502 @default.
- W2015965417 cites W2131723735 @default.
- W2015965417 cites W2136289510 @default.
- W2015965417 cites W2148503942 @default.
- W2015965417 cites W2152345429 @default.
- W2015965417 cites W2154380913 @default.
- W2015965417 cites W2155606803 @default.
- W2015965417 cites W2160843353 @default.
- W2015965417 cites W2166121654 @default.
- W2015965417 doi "https://doi.org/10.1016/j.sna.2006.02.053" @default.
- W2015965417 hasPublicationYear "2007" @default.
- W2015965417 type Work @default.
- W2015965417 sameAs 2015965417 @default.
- W2015965417 citedByCount "9" @default.
- W2015965417 countsByYear W20159654172014 @default.
- W2015965417 countsByYear W20159654172016 @default.
- W2015965417 countsByYear W20159654172018 @default.
- W2015965417 crossrefType "journal-article" @default.
- W2015965417 hasAuthorship W2015965417A5039472183 @default.
- W2015965417 hasAuthorship W2015965417A5051806177 @default.
- W2015965417 hasAuthorship W2015965417A5075578763 @default.
- W2015965417 hasConcept C100460472 @default.
- W2015965417 hasConcept C110339231 @default.
- W2015965417 hasConcept C136525101 @default.
- W2015965417 hasConcept C142724271 @default.
- W2015965417 hasConcept C145667562 @default.
- W2015965417 hasConcept C159985019 @default.
- W2015965417 hasConcept C171250308 @default.
- W2015965417 hasConcept C192562407 @default.
- W2015965417 hasConcept C204787440 @default.
- W2015965417 hasConcept C2779227376 @default.
- W2015965417 hasConcept C37292000 @default.
- W2015965417 hasConcept C37977207 @default.
- W2015965417 hasConcept C46362747 @default.
- W2015965417 hasConcept C49040817 @default.
- W2015965417 hasConcept C513153333 @default.
- W2015965417 hasConcept C71924100 @default.
- W2015965417 hasConcept C87976508 @default.
- W2015965417 hasConceptScore W2015965417C100460472 @default.
- W2015965417 hasConceptScore W2015965417C110339231 @default.
- W2015965417 hasConceptScore W2015965417C136525101 @default.
- W2015965417 hasConceptScore W2015965417C142724271 @default.
- W2015965417 hasConceptScore W2015965417C145667562 @default.
- W2015965417 hasConceptScore W2015965417C159985019 @default.
- W2015965417 hasConceptScore W2015965417C171250308 @default.
- W2015965417 hasConceptScore W2015965417C192562407 @default.
- W2015965417 hasConceptScore W2015965417C204787440 @default.
- W2015965417 hasConceptScore W2015965417C2779227376 @default.
- W2015965417 hasConceptScore W2015965417C37292000 @default.
- W2015965417 hasConceptScore W2015965417C37977207 @default.
- W2015965417 hasConceptScore W2015965417C46362747 @default.
- W2015965417 hasConceptScore W2015965417C49040817 @default.
- W2015965417 hasConceptScore W2015965417C513153333 @default.
- W2015965417 hasConceptScore W2015965417C71924100 @default.
- W2015965417 hasConceptScore W2015965417C87976508 @default.
- W2015965417 hasIssue "2" @default.
- W2015965417 hasLocation W20159654171 @default.
- W2015965417 hasOpenAccess W2015965417 @default.
- W2015965417 hasPrimaryLocation W20159654171 @default.
- W2015965417 hasRelatedWork W1965459506 @default.
- W2015965417 hasRelatedWork W1981865689 @default.
- W2015965417 hasRelatedWork W1987425020 @default.
- W2015965417 hasRelatedWork W2003623875 @default.
- W2015965417 hasRelatedWork W2006022085 @default.
- W2015965417 hasRelatedWork W2058945371 @default.
- W2015965417 hasRelatedWork W2082271187 @default.
- W2015965417 hasRelatedWork W2090616240 @default.
- W2015965417 hasRelatedWork W2351679394 @default.
- W2015965417 hasRelatedWork W3156047245 @default.
- W2015965417 hasVolume "134" @default.
- W2015965417 isParatext "false" @default.
- W2015965417 isRetracted "false" @default.
- W2015965417 magId "2015965417" @default.
- W2015965417 workType "article" @default.