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- W2016012221 abstract "Plasma created and sustained by a surface wave from a partial-coaxial cavity resonator have been studied. In this work, two types of plasma source geometries are compared, (1) a dielectric disk on ground plane structure (DPSW), and (2) a dielectric disk between a parallel plate structure with a holey top plate (HPSW). In both cases, an evanescent electric field is produced from the cavity resonator to a plasma production chamber of 40 mm diameter. Thus, high-density plasma is generated by the interaction of the evanescent field with particles. This work shows that the plasma density and uniformity of the holey-plate structure is higher than that of the dielectric disk structure. For the holey-plate structure, the plasma density is 7.5×1011 cm−3 with an electron temperature of 3 eV at an argon gas pressure of 13 Pa." @default.
- W2016012221 created "2016-06-24" @default.
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- W2016012221 date "1998-05-01" @default.
- W2016012221 modified "2023-10-16" @default.
- W2016012221 title "Disk plasma generation using a holey-plate surface-wave structure on a coaxial waveguide" @default.
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- W2016012221 doi "https://doi.org/10.1063/1.1148894" @default.
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