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- W2016039906 abstract "Surface features, roughness and reflectivity of AlSi alloy thin films deposited by rf sputtering at different voltages is studied for IC metallization." @default.
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- W2016039906 date "1986-04-01" @default.
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- W2016039906 title "On the specular reflectivity of rf sputtered AlSi alloy thin films" @default.
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