Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016046812> ?p ?o ?g. }
Showing items 1 to 75 of
75
with 100 items per page.
- W2016046812 endingPage "2779" @default.
- W2016046812 startingPage "2779" @default.
- W2016046812 abstract "The patterning characteristics of oblique illumination lithography are investigated. When the reticle is illuminated obliquely, the pattern widths corresponding to the opaque parts of the reticle are apt to become thinner than those replicated by conventional optical lithography. This characteristic is verified by both analysis of the projected image intensity distribution and some patterning experiments. The double harmony of the periodical pattern image plays an important role in defining the pattern widths. We concluded that the lack of the double harmonic light waves caused the pattern shrinkage in the case of oblique illumination lithography. In recognizing the above differences, the exposure dose can be suitably controlled so as to attain high resolution and large focus latitude." @default.
- W2016046812 created "2016-06-24" @default.
- W2016046812 creator A5008371831 @default.
- W2016046812 creator A5019191680 @default.
- W2016046812 creator A5064000180 @default.
- W2016046812 creator A5066362562 @default.
- W2016046812 creator A5076063475 @default.
- W2016046812 creator A5081422004 @default.
- W2016046812 date "1994-05-01" @default.
- W2016046812 modified "2023-10-18" @default.
- W2016046812 title "Patterning Characteristics of Oblique Illumination Optical Lithography" @default.
- W2016046812 cites W2021509191 @default.
- W2016046812 cites W2028873070 @default.
- W2016046812 cites W2051989131 @default.
- W2016046812 cites W2084149989 @default.
- W2016046812 doi "https://doi.org/10.1143/jjap.33.2779" @default.
- W2016046812 hasPublicationYear "1994" @default.
- W2016046812 type Work @default.
- W2016046812 sameAs 2016046812 @default.
- W2016046812 citedByCount "4" @default.
- W2016046812 countsByYear W20160468122018 @default.
- W2016046812 crossrefType "journal-article" @default.
- W2016046812 hasAuthorship W2016046812A5008371831 @default.
- W2016046812 hasAuthorship W2016046812A5019191680 @default.
- W2016046812 hasAuthorship W2016046812A5064000180 @default.
- W2016046812 hasAuthorship W2016046812A5066362562 @default.
- W2016046812 hasAuthorship W2016046812A5076063475 @default.
- W2016046812 hasAuthorship W2016046812A5081422004 @default.
- W2016046812 hasConcept C105487726 @default.
- W2016046812 hasConcept C120665830 @default.
- W2016046812 hasConcept C121332964 @default.
- W2016046812 hasConcept C138885662 @default.
- W2016046812 hasConcept C146617872 @default.
- W2016046812 hasConcept C160671074 @default.
- W2016046812 hasConcept C160697094 @default.
- W2016046812 hasConcept C192209626 @default.
- W2016046812 hasConcept C192562407 @default.
- W2016046812 hasConcept C204223013 @default.
- W2016046812 hasConcept C41895202 @default.
- W2016046812 hasConcept C49040817 @default.
- W2016046812 hasConcept C60056205 @default.
- W2016046812 hasConceptScore W2016046812C105487726 @default.
- W2016046812 hasConceptScore W2016046812C120665830 @default.
- W2016046812 hasConceptScore W2016046812C121332964 @default.
- W2016046812 hasConceptScore W2016046812C138885662 @default.
- W2016046812 hasConceptScore W2016046812C146617872 @default.
- W2016046812 hasConceptScore W2016046812C160671074 @default.
- W2016046812 hasConceptScore W2016046812C160697094 @default.
- W2016046812 hasConceptScore W2016046812C192209626 @default.
- W2016046812 hasConceptScore W2016046812C192562407 @default.
- W2016046812 hasConceptScore W2016046812C204223013 @default.
- W2016046812 hasConceptScore W2016046812C41895202 @default.
- W2016046812 hasConceptScore W2016046812C49040817 @default.
- W2016046812 hasConceptScore W2016046812C60056205 @default.
- W2016046812 hasIssue "5R" @default.
- W2016046812 hasLocation W20160468121 @default.
- W2016046812 hasOpenAccess W2016046812 @default.
- W2016046812 hasPrimaryLocation W20160468121 @default.
- W2016046812 hasRelatedWork W1983475783 @default.
- W2016046812 hasRelatedWork W1987633659 @default.
- W2016046812 hasRelatedWork W1996082410 @default.
- W2016046812 hasRelatedWork W2016008899 @default.
- W2016046812 hasRelatedWork W2025731743 @default.
- W2016046812 hasRelatedWork W2052805415 @default.
- W2016046812 hasRelatedWork W2055475127 @default.
- W2016046812 hasRelatedWork W2079706469 @default.
- W2016046812 hasRelatedWork W2084303300 @default.
- W2016046812 hasRelatedWork W23335930 @default.
- W2016046812 hasVolume "33" @default.
- W2016046812 isParatext "false" @default.
- W2016046812 isRetracted "false" @default.
- W2016046812 magId "2016046812" @default.
- W2016046812 workType "article" @default.