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- W2016064186 abstract "A new alloyed-liquid-metal ion source for ion implantation into III-V compound semiconductors has been developed. A ternary alloy consisting of Au, Si & Be is used as the liquid metal for this ion source which is capable of emitting p-type dopant (Be), n-type dopant (Si), and Au ions from a single emitter tip. Threshold voltage for emitting ion current is about 6 kV and Be ++ , Si ++ and Au + ions are dominant. Energy spreads of Be and Si ion beams are less than 10 eV, while that of Au was greater than 15 eV." @default.
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- W2016064186 date "1983-04-01" @default.
- W2016064186 modified "2023-09-25" @default.
- W2016064186 title "Au–Si–Be Liquid Metal Ion Source for Maskless Ion Implantation" @default.
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- W2016064186 doi "https://doi.org/10.1143/jjap.22.l225" @default.
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