Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016064765> ?p ?o ?g. }
Showing items 1 to 54 of
54
with 100 items per page.
- W2016064765 abstract "Excimer laser have developed from physicists' 'toys' to powerful manufacturing tools, offering unique benefits to a wide range of applications. Nearly all technical and biological/medical materials can be structured by the intensive UV light. In the year 1997 the number of installations on manufacturing floors will be much higher than ever before. Besides the medical uses the most important applications are DUV lithography, TFT annealing for flat panel displays and microdrilling of hole arrays, especially for ink jet printer heads and or microelectronics packaging. This paper will present three main reasons of this breakthrough: The first is in the regard to the performance of the excimer laser itself. Technology developments by laser manufacturers have resulted in remarkable improvements in component lifetime, reliability, cost of ownership and ease of use. With gas lifetimes in excess of 10<SUP>8</SUP> pulses, laser tube exchange intervals longer than 5 X 10<SUP>9</SUP> pulses and integration of internal halogen generators quasi sealed-off excimer laser with hands-free operation are accomplished. The actually introduced NovaLine technology combines the experience of more than 4000 installed excimer laser with a completely new laser engineering. The second topic is a much more efficient way of using the UV photons. Progress in UV optics will be demonstrated with advanced approaches for beam delivery systems for i) drilling of interconnections in electronic packaging, ii) processing of micronozzle arrays for ink jet printers, and iii) line-beam-optics for scanning applications, especially for annealing of TFT's for AMLCD flat panel displays. The final reason is the achieved application performance itself, which will be shown with actual results." @default.
- W2016064765 created "2016-06-24" @default.
- W2016064765 creator A5002741679 @default.
- W2016064765 creator A5024338864 @default.
- W2016064765 creator A5086872012 @default.
- W2016064765 date "1997-08-18" @default.
- W2016064765 modified "2023-09-23" @default.
- W2016064765 title "<title>Excimer laser in industrial material processing</title>" @default.
- W2016064765 doi "https://doi.org/10.1117/12.280573" @default.
- W2016064765 hasPublicationYear "1997" @default.
- W2016064765 type Work @default.
- W2016064765 sameAs 2016064765 @default.
- W2016064765 citedByCount "0" @default.
- W2016064765 crossrefType "proceedings-article" @default.
- W2016064765 hasAuthorship W2016064765A5002741679 @default.
- W2016064765 hasAuthorship W2016064765A5024338864 @default.
- W2016064765 hasAuthorship W2016064765A5086872012 @default.
- W2016064765 hasConcept C120665830 @default.
- W2016064765 hasConcept C121332964 @default.
- W2016064765 hasConcept C187937830 @default.
- W2016064765 hasConcept C192562407 @default.
- W2016064765 hasConcept C204223013 @default.
- W2016064765 hasConcept C2780477314 @default.
- W2016064765 hasConcept C41008148 @default.
- W2016064765 hasConcept C49040817 @default.
- W2016064765 hasConcept C520434653 @default.
- W2016064765 hasConcept C74561354 @default.
- W2016064765 hasConceptScore W2016064765C120665830 @default.
- W2016064765 hasConceptScore W2016064765C121332964 @default.
- W2016064765 hasConceptScore W2016064765C187937830 @default.
- W2016064765 hasConceptScore W2016064765C192562407 @default.
- W2016064765 hasConceptScore W2016064765C204223013 @default.
- W2016064765 hasConceptScore W2016064765C2780477314 @default.
- W2016064765 hasConceptScore W2016064765C41008148 @default.
- W2016064765 hasConceptScore W2016064765C49040817 @default.
- W2016064765 hasConceptScore W2016064765C520434653 @default.
- W2016064765 hasConceptScore W2016064765C74561354 @default.
- W2016064765 hasLocation W20160647651 @default.
- W2016064765 hasOpenAccess W2016064765 @default.
- W2016064765 hasPrimaryLocation W20160647651 @default.
- W2016064765 hasRelatedWork W1971432470 @default.
- W2016064765 hasRelatedWork W2007136508 @default.
- W2016064765 hasRelatedWork W2023366730 @default.
- W2016064765 hasRelatedWork W2099263797 @default.
- W2016064765 hasRelatedWork W2170084830 @default.
- W2016064765 hasRelatedWork W2323315935 @default.
- W2016064765 hasRelatedWork W2415424868 @default.
- W2016064765 hasRelatedWork W2489769816 @default.
- W2016064765 hasRelatedWork W4320811756 @default.
- W2016064765 hasRelatedWork W4321075865 @default.
- W2016064765 isParatext "false" @default.
- W2016064765 isRetracted "false" @default.
- W2016064765 magId "2016064765" @default.
- W2016064765 workType "article" @default.