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• W2016077947 abstract "Lithographic conditions are typically optimized for a specific feature type; while some levels expose lines and spaces, others target contacts and islands. In today's challenging lithographic environment, printing multiple feature types on the same reticle is being discussed. The overlapping process window must then be considered. It is well-established in the industry that, for DNQ systems, two dimensional structures print at different doses than one dimensional structures of the same nominal chrome or clear size on the reticle. In this paper, the overlapping or common process window for all of these features is examined using a state-of-the-art i-line negative photoresist. When evaluating depth of focus (DOF) and exposure latitude, a +/- 0.10 micrometers deviation from target was used. Contact holes consistently limited the common process window. Three illumination conditions were examined: 0.57 NA with 0.38 sigma, 0.57 NA with 0.67 sigma, and 0.60 NA with 0.38 sigma. For total common process window, the 0.57 NA and 0.38 sigma condition was found to be optimal. PROLITH/2 aerial image simulations were found to agree with experimental result regarding an increased common exposure latitude with high NA and low sigma. The nominal feature dimensions were: 0.44 micrometers isolated lines, 0.44 micrometers isolated spaces, 0.4 X 1.5 micrometers contact,s and 0.4 X 1.5 micrometers islands. The nominal dimensions for contacts and islands were chosen to maintain a 3:1 area rule should the minimum dimension be used for one side of the features. The importance of a minimum area rule is discussed. Some early work on a second i-line negative resist targeted to simultaneously print 0.30-0.40 micrometers lines and spaces with 0.35-0.50 micrometers <SUP>2</SUP> contacts and islands is mentioned." @default.
• W2016077947 created "2016-06-24" @default.
• W2016077947 creator A5019296274 @default.
• W2016077947 creator A5021531929 @default.
• W2016077947 creator A5030754170 @default.
• W2016077947 creator A5050034582 @default.
• W2016077947 creator A5067838568 @default.
• W2016077947 creator A5090286493 @default.
• W2016077947 date "1999-06-11" @default.
• W2016077947 modified "2023-09-27" @default.
• W2016077947 title "Printing various feature types at low k factors with advanced i-line negative resists" @default.
• W2016077947 cites W2165032065 @default.
• W2016077947 doi "https://doi.org/10.1117/12.350278" @default.
• W2016077947 hasPublicationYear "1999" @default.
• W2016077947 type Work @default.
• W2016077947 sameAs 2016077947 @default.
• W2016077947 citedByCount "0" @default.
• W2016077947 crossrefType "proceedings-article" @default.
• W2016077947 hasAuthorship W2016077947A5019296274 @default.
• W2016077947 hasAuthorship W2016077947A5021531929 @default.
• W2016077947 hasAuthorship W2016077947A5030754170 @default.
• W2016077947 hasAuthorship W2016077947A5050034582 @default.
• W2016077947 hasAuthorship W2016077947A5067838568 @default.
• W2016077947 hasAuthorship W2016077947A5090286493 @default.
• W2016077947 hasConcept C105487726 @default.
• W2016077947 hasConcept C111919701 @default.
• W2016077947 hasConcept C114614502 @default.
• W2016077947 hasConcept C115961682 @default.
• W2016077947 hasConcept C120665830 @default.
• W2016077947 hasConcept C121332964 @default.
• W2016077947 hasConcept C134406635 @default.
• W2016077947 hasConcept C138885662 @default.
• W2016077947 hasConcept C146617872 @default.
• W2016077947 hasConcept C154945302 @default.
• W2016077947 hasConcept C160671074 @default.
• W2016077947 hasConcept C171250308 @default.
• W2016077947 hasConcept C192209626 @default.
• W2016077947 hasConcept C192562407 @default.
• W2016077947 hasConcept C198352243 @default.
• W2016077947 hasConcept C204223013 @default.
• W2016077947 hasConcept C207789793 @default.
• W2016077947 hasConcept C2524010 @default.
• W2016077947 hasConcept C2776401178 @default.
• W2016077947 hasConcept C2776429412 @default.
• W2016077947 hasConcept C2777441419 @default.
• W2016077947 hasConcept C2778049214 @default.
• W2016077947 hasConcept C2778751112 @default.
• W2016077947 hasConcept C2779227376 @default.
• W2016077947 hasConcept C33676613 @default.
• W2016077947 hasConcept C33923547 @default.
• W2016077947 hasConcept C41008148 @default.
• W2016077947 hasConcept C41895202 @default.
• W2016077947 hasConcept C49040817 @default.
• W2016077947 hasConcept C53524968 @default.
• W2016077947 hasConcept C62520636 @default.
• W2016077947 hasConceptScore W2016077947C105487726 @default.
• W2016077947 hasConceptScore W2016077947C111919701 @default.
• W2016077947 hasConceptScore W2016077947C114614502 @default.
• W2016077947 hasConceptScore W2016077947C115961682 @default.
• W2016077947 hasConceptScore W2016077947C120665830 @default.
• W2016077947 hasConceptScore W2016077947C121332964 @default.
• W2016077947 hasConceptScore W2016077947C134406635 @default.
• W2016077947 hasConceptScore W2016077947C138885662 @default.
• W2016077947 hasConceptScore W2016077947C146617872 @default.
• W2016077947 hasConceptScore W2016077947C154945302 @default.
• W2016077947 hasConceptScore W2016077947C160671074 @default.
• W2016077947 hasConceptScore W2016077947C171250308 @default.
• W2016077947 hasConceptScore W2016077947C192209626 @default.
• W2016077947 hasConceptScore W2016077947C192562407 @default.
• W2016077947 hasConceptScore W2016077947C198352243 @default.
• W2016077947 hasConceptScore W2016077947C204223013 @default.
• W2016077947 hasConceptScore W2016077947C207789793 @default.
• W2016077947 hasConceptScore W2016077947C2524010 @default.
• W2016077947 hasConceptScore W2016077947C2776401178 @default.
• W2016077947 hasConceptScore W2016077947C2776429412 @default.
• W2016077947 hasConceptScore W2016077947C2777441419 @default.
• W2016077947 hasConceptScore W2016077947C2778049214 @default.
• W2016077947 hasConceptScore W2016077947C2778751112 @default.
• W2016077947 hasConceptScore W2016077947C2779227376 @default.
• W2016077947 hasConceptScore W2016077947C33676613 @default.
• W2016077947 hasConceptScore W2016077947C33923547 @default.
• W2016077947 hasConceptScore W2016077947C41008148 @default.
• W2016077947 hasConceptScore W2016077947C41895202 @default.
• W2016077947 hasConceptScore W2016077947C49040817 @default.
• W2016077947 hasConceptScore W2016077947C53524968 @default.
• W2016077947 hasConceptScore W2016077947C62520636 @default.
• W2016077947 hasLocation W20160779471 @default.
• W2016077947 hasOpenAccess W2016077947 @default.
• W2016077947 hasPrimaryLocation W20160779471 @default.
• W2016077947 hasRelatedWork W1979614610 @default.
• W2016077947 hasRelatedWork W1986705012 @default.
• W2016077947 hasRelatedWork W1991804230 @default.
• W2016077947 hasRelatedWork W2005152660 @default.
• W2016077947 hasRelatedWork W2012824115 @default.
• W2016077947 hasRelatedWork W2080447637 @default.
• W2016077947 hasRelatedWork W2921086790 @default.
• W2016077947 hasRelatedWork W4235996109 @default.
• W2016077947 hasRelatedWork W2093555857 @default.
• W2016077947 hasRelatedWork W2740872904 @default.
• W2016077947 isParatext "false" @default.

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