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- W2016090823 abstract "SnO 2 thin films on three different kinds of substrates (sapphire, alumina, and Si with 1000 Å-thin oxide layer) were grown by a reactive r.f. magnetron sputter method. Epitaxial SnO 2 thin film without an apparent grain structure but with high dislocation density along lateral direction to substrate was grown on a sapphire substrate. The microstructure of the thin film was investigated, using the 3C2 beam line from a Pohang Light Source (PLS) consisting of a 2-GeV electron accelerator, 4 circle X-ray diffractometer, and AFM. It was confirmed that the thin film grew epitaxially on the sapphire substrate with variants structure. A large defect density was exhibited on the surface of the epitaxial thin film, which is related to sorption sites reacted with the gas. SnO 2 films on the polished alumina and Si substrate showed poly-crystalline structure of tetragonal structure, low resistance of about 10 Ω, and good optical transmittance. An epitaxial SnO 2 thin film exhibited the highest sensitivity to combustible gases and a particular sensitivity of 95% to alcohol at 2000 ppm and 350°C. The sensor also showed a good stability with small baseline drift and short reaction times of about 5 seconds, respectively. This experiment confirms substrate effects on characteristics of an SnO 2 thin film plus the potential for the application of epitaxial SnO 2 film in the production of stable gas sensors." @default.
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- W2016090823 date "2004-06-01" @default.
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- W2016090823 title "Effects of Substrates on Properties of Tin Oxide Gas Sensors" @default.
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- W2016090823 doi "https://doi.org/10.1143/jjap.43.3493" @default.
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