Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016096739> ?p ?o ?g. }
- W2016096739 endingPage "822" @default.
- W2016096739 startingPage "819" @default.
- W2016096739 abstract "Atomic layer deposition (ALD) of zinc oxide (ZnO) films on (0 0 0 1) sapphire substrates was conducted at low temperatures by using diethyl-zinc (DEZn) and nitrous oxide (N2O) as precursors. It was found that a monolayer-by-monolayer growth regime occurred at 300 °C in a range of DEZn flow rates from 5.7 to 8.7 μmol/min. Furthermore, the temperature self-limiting process window for the ALD-grown ZnO films was also observed ranging from 290 to 310 °C. A deposition mechanism is proposed to explain how saturated growth of ZnO is achieved by using DEZn and N2O. Transmission spectroscopic studies of the ZnO films prepared in the self-limiting regime show that the transmittances of ZnO films are as high as 80% in visible and near infrared spectra. Experimental results indicate that ZnO films with high optical quality can be achieved by ALD at low temperatures using DEZn and N2O precursors." @default.
- W2016096739 created "2016-06-24" @default.
- W2016096739 creator A5036606334 @default.
- W2016096739 creator A5056724668 @default.
- W2016096739 creator A5058343511 @default.
- W2016096739 creator A5058437078 @default.
- W2016096739 creator A5068319749 @default.
- W2016096739 creator A5069644296 @default.
- W2016096739 creator A5075206453 @default.
- W2016096739 creator A5079892485 @default.
- W2016096739 creator A5086071438 @default.
- W2016096739 date "2009-11-01" @default.
- W2016096739 modified "2023-10-14" @default.
- W2016096739 title "Self-limiting growth of ZnO films on (0001) sapphire substrates by atomic layer deposition at low temperatures using diethyl-zinc and nitrous oxide" @default.
- W2016096739 cites W1491330362 @default.
- W2016096739 cites W1968326438 @default.
- W2016096739 cites W1990807972 @default.
- W2016096739 cites W1995304771 @default.
- W2016096739 cites W1999978373 @default.
- W2016096739 cites W2016161475 @default.
- W2016096739 cites W2026736175 @default.
- W2016096739 cites W2035820974 @default.
- W2016096739 cites W2051021747 @default.
- W2016096739 cites W2058606961 @default.
- W2016096739 cites W2083762129 @default.
- W2016096739 cites W2120245648 @default.
- W2016096739 cites W2143005401 @default.
- W2016096739 cites W2203711854 @default.
- W2016096739 doi "https://doi.org/10.1016/j.apsusc.2009.08.067" @default.
- W2016096739 hasPublicationYear "2009" @default.
- W2016096739 type Work @default.
- W2016096739 sameAs 2016096739 @default.
- W2016096739 citedByCount "20" @default.
- W2016096739 countsByYear W20160967392012 @default.
- W2016096739 countsByYear W20160967392013 @default.
- W2016096739 countsByYear W20160967392014 @default.
- W2016096739 countsByYear W20160967392015 @default.
- W2016096739 countsByYear W20160967392016 @default.
- W2016096739 countsByYear W20160967392017 @default.
- W2016096739 countsByYear W20160967392018 @default.
- W2016096739 countsByYear W20160967392020 @default.
- W2016096739 countsByYear W20160967392021 @default.
- W2016096739 crossrefType "journal-article" @default.
- W2016096739 hasAuthorship W2016096739A5036606334 @default.
- W2016096739 hasAuthorship W2016096739A5056724668 @default.
- W2016096739 hasAuthorship W2016096739A5058343511 @default.
- W2016096739 hasAuthorship W2016096739A5058437078 @default.
- W2016096739 hasAuthorship W2016096739A5068319749 @default.
- W2016096739 hasAuthorship W2016096739A5069644296 @default.
- W2016096739 hasAuthorship W2016096739A5075206453 @default.
- W2016096739 hasAuthorship W2016096739A5079892485 @default.
- W2016096739 hasAuthorship W2016096739A5086071438 @default.
- W2016096739 hasConcept C107872376 @default.
- W2016096739 hasConcept C113196181 @default.
- W2016096739 hasConcept C120665830 @default.
- W2016096739 hasConcept C121332964 @default.
- W2016096739 hasConcept C127413603 @default.
- W2016096739 hasConcept C146686406 @default.
- W2016096739 hasConcept C151730666 @default.
- W2016096739 hasConcept C161790260 @default.
- W2016096739 hasConcept C171250308 @default.
- W2016096739 hasConcept C178790620 @default.
- W2016096739 hasConcept C179104552 @default.
- W2016096739 hasConcept C185592680 @default.
- W2016096739 hasConcept C19067145 @default.
- W2016096739 hasConcept C191897082 @default.
- W2016096739 hasConcept C192562407 @default.
- W2016096739 hasConcept C2777573673 @default.
- W2016096739 hasConcept C2779227376 @default.
- W2016096739 hasConcept C2780064504 @default.
- W2016096739 hasConcept C2781194912 @default.
- W2016096739 hasConcept C2816523 @default.
- W2016096739 hasConcept C42360764 @default.
- W2016096739 hasConcept C48123060 @default.
- W2016096739 hasConcept C520434653 @default.
- W2016096739 hasConcept C535196362 @default.
- W2016096739 hasConcept C57410435 @default.
- W2016096739 hasConcept C64297162 @default.
- W2016096739 hasConcept C69544855 @default.
- W2016096739 hasConcept C7070889 @default.
- W2016096739 hasConcept C86803240 @default.
- W2016096739 hasConceptScore W2016096739C107872376 @default.
- W2016096739 hasConceptScore W2016096739C113196181 @default.
- W2016096739 hasConceptScore W2016096739C120665830 @default.
- W2016096739 hasConceptScore W2016096739C121332964 @default.
- W2016096739 hasConceptScore W2016096739C127413603 @default.
- W2016096739 hasConceptScore W2016096739C146686406 @default.
- W2016096739 hasConceptScore W2016096739C151730666 @default.
- W2016096739 hasConceptScore W2016096739C161790260 @default.
- W2016096739 hasConceptScore W2016096739C171250308 @default.
- W2016096739 hasConceptScore W2016096739C178790620 @default.
- W2016096739 hasConceptScore W2016096739C179104552 @default.
- W2016096739 hasConceptScore W2016096739C185592680 @default.
- W2016096739 hasConceptScore W2016096739C19067145 @default.
- W2016096739 hasConceptScore W2016096739C191897082 @default.
- W2016096739 hasConceptScore W2016096739C192562407 @default.
- W2016096739 hasConceptScore W2016096739C2777573673 @default.
- W2016096739 hasConceptScore W2016096739C2779227376 @default.