Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016100036> ?p ?o ?g. }
Showing items 1 to 95 of
95
with 100 items per page.
- W2016100036 endingPage "301" @default.
- W2016100036 startingPage "294" @default.
- W2016100036 abstract "For pt.VII see ibid., vol.SC14, no.2, p.291 (1979). The effect of electron-beam radiation on polysilicon-gate MOSFETs is examined. The irradiations were performed at 25 kV in a vector scan electron-beam lithography system at dosages typical of those used to expose electron-beam resists. Two types of studies are reported. In the first type, devices fabricated with optical lithography were exposed to blanket electron-beam radiation after fabrication. In the second, discrete devices from a test chip, fabricated entirely with electron-beam lithography, were used." @default.
- W2016100036 created "2016-06-24" @default.
- W2016100036 creator A5027072605 @default.
- W2016100036 date "1979-04-01" @default.
- W2016100036 modified "2023-09-27" @default.
- W2016100036 title "1 /spl mu/m MOSFET VLSI technology. VIII. Radiation effects" @default.
- W2016100036 cites W1964966560 @default.
- W2016100036 cites W1994361850 @default.
- W2016100036 cites W1996900454 @default.
- W2016100036 cites W1997406299 @default.
- W2016100036 cites W1998757961 @default.
- W2016100036 cites W2002327997 @default.
- W2016100036 cites W2009022458 @default.
- W2016100036 cites W2015101381 @default.
- W2016100036 cites W2017766968 @default.
- W2016100036 cites W2052990982 @default.
- W2016100036 cites W2053663438 @default.
- W2016100036 cites W2071385819 @default.
- W2016100036 cites W2079370741 @default.
- W2016100036 doi "https://doi.org/10.1109/jssc.1979.1051177" @default.
- W2016100036 hasPublicationYear "1979" @default.
- W2016100036 type Work @default.
- W2016100036 sameAs 2016100036 @default.
- W2016100036 citedByCount "17" @default.
- W2016100036 crossrefType "journal-article" @default.
- W2016100036 hasAuthorship W2016100036A5027072605 @default.
- W2016100036 hasConcept C105163801 @default.
- W2016100036 hasConcept C119599485 @default.
- W2016100036 hasConcept C120665830 @default.
- W2016100036 hasConcept C121332964 @default.
- W2016100036 hasConcept C127413603 @default.
- W2016100036 hasConcept C136525101 @default.
- W2016100036 hasConcept C142724271 @default.
- W2016100036 hasConcept C14580979 @default.
- W2016100036 hasConcept C147120987 @default.
- W2016100036 hasConcept C153385146 @default.
- W2016100036 hasConcept C163581340 @default.
- W2016100036 hasConcept C168834538 @default.
- W2016100036 hasConcept C171250308 @default.
- W2016100036 hasConcept C185544564 @default.
- W2016100036 hasConcept C192562407 @default.
- W2016100036 hasConcept C200274948 @default.
- W2016100036 hasConcept C204223013 @default.
- W2016100036 hasConcept C204787440 @default.
- W2016100036 hasConcept C2779227376 @default.
- W2016100036 hasConcept C41794268 @default.
- W2016100036 hasConcept C49040817 @default.
- W2016100036 hasConcept C53524968 @default.
- W2016100036 hasConcept C71924100 @default.
- W2016100036 hasConcept C95312477 @default.
- W2016100036 hasConceptScore W2016100036C105163801 @default.
- W2016100036 hasConceptScore W2016100036C119599485 @default.
- W2016100036 hasConceptScore W2016100036C120665830 @default.
- W2016100036 hasConceptScore W2016100036C121332964 @default.
- W2016100036 hasConceptScore W2016100036C127413603 @default.
- W2016100036 hasConceptScore W2016100036C136525101 @default.
- W2016100036 hasConceptScore W2016100036C142724271 @default.
- W2016100036 hasConceptScore W2016100036C14580979 @default.
- W2016100036 hasConceptScore W2016100036C147120987 @default.
- W2016100036 hasConceptScore W2016100036C153385146 @default.
- W2016100036 hasConceptScore W2016100036C163581340 @default.
- W2016100036 hasConceptScore W2016100036C168834538 @default.
- W2016100036 hasConceptScore W2016100036C171250308 @default.
- W2016100036 hasConceptScore W2016100036C185544564 @default.
- W2016100036 hasConceptScore W2016100036C192562407 @default.
- W2016100036 hasConceptScore W2016100036C200274948 @default.
- W2016100036 hasConceptScore W2016100036C204223013 @default.
- W2016100036 hasConceptScore W2016100036C204787440 @default.
- W2016100036 hasConceptScore W2016100036C2779227376 @default.
- W2016100036 hasConceptScore W2016100036C41794268 @default.
- W2016100036 hasConceptScore W2016100036C49040817 @default.
- W2016100036 hasConceptScore W2016100036C53524968 @default.
- W2016100036 hasConceptScore W2016100036C71924100 @default.
- W2016100036 hasConceptScore W2016100036C95312477 @default.
- W2016100036 hasIssue "2" @default.
- W2016100036 hasLocation W20161000361 @default.
- W2016100036 hasOpenAccess W2016100036 @default.
- W2016100036 hasPrimaryLocation W20161000361 @default.
- W2016100036 hasRelatedWork W1599891132 @default.
- W2016100036 hasRelatedWork W1970115220 @default.
- W2016100036 hasRelatedWork W1973769725 @default.
- W2016100036 hasRelatedWork W2075721396 @default.
- W2016100036 hasRelatedWork W2090563245 @default.
- W2016100036 hasRelatedWork W2092404174 @default.
- W2016100036 hasRelatedWork W2114831268 @default.
- W2016100036 hasRelatedWork W2313409874 @default.
- W2016100036 hasRelatedWork W2381201749 @default.
- W2016100036 hasRelatedWork W2526625958 @default.
- W2016100036 hasVolume "14" @default.
- W2016100036 isParatext "false" @default.
- W2016100036 isRetracted "false" @default.
- W2016100036 magId "2016100036" @default.
- W2016100036 workType "article" @default.