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- W2016115006 abstract "A two-dimensional numerical model employing the finite element method was used to phenomenologically describe the effect of buoyancy forces on fluid flow and growth rate for mass transfer-controlled chemical vapor deposition in chimney reactors. For typical reactor geometries at 0.1 atm pressure, buoyancy effects are insignificant, and fluid flow and growth rate uniformity are unaffected by reactor orientation. In the normal orientation with upward gas flow at atmospheric pressure, buoyancy forces influence the flow. For moderate Gr/Re (proportional to the ratio of buoyancy-to-viscous forces), the velocity profile deviates noticeably from parabolic at the front of the susceptor, with an increased buoyancy-driven flow near the susceptor, a decreased flow rate at the centerline, and maximum velocity at a location between the centerline and the susceptor. At the trailing edge of the susceptor, buoyancy-driven recirculating flow occurs. Growth rate uniformity decreases as compared to growth at 0.1 atm pressure. For downward gas flow at atmospheric pressure and moderate Gr/Re, recirculating flow occurs over the leading edge of the susceptor and decreased flow at the centerline occurs over the trailing edge. At high Gr/Re, asymmetric flow or eddying can occur for both upward and downward gas flow." @default.
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- W2016115006 date "1992-11-01" @default.
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- W2016115006 title "Modeling of chimney CVD reactors" @default.
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- W2016115006 doi "https://doi.org/10.1016/0022-0248(92)90344-i" @default.
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