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- W2016122579 endingPage "2557" @default.
- W2016122579 startingPage "2553" @default.
- W2016122579 abstract "Nanocrystalline diamond films have been grown in a hot filament CVD (HFCVD) system allowing BEN, textured growth and HOD growth of diamond on 4″ silicon (100). The growth process of nanocrystalline diamond discussed here consists of a BEN process for diamond nucleation on silicon, with a density of more than 1010 cm–2 across the entire wafer surface. The subsequent growth of the nanocrystalline diamond films is achieved by addition of nitrogen into the gas phase with a relative concentration to carbon of 1:1. At substrate temperatures between 680 °C and 740 °C, closed diamond films are grown with thicknesses between 1 μm and 20 μm. At low nitrogen concentrations the nanocrystalline diamond films exhibit still a columnar structure with a lateral grain size below 200 nm whereas the vertical grain size can reach several microns. Higher nitrogen concentrations lead to a nanocrystalline diamond growth mode with no columnar structure and a grain size is no longer detectable by SEM. The advantages of diamond in MEMS technology rely on its outstanding mechanical and thermal properties. Additionally, the stress distribution inside the diamond films due to thermal expansion as well as the polycrystalline nature of the film has to be taken into account. Applying different test structures we could measure fracture strength of more than 4.0 GPa and elasticity moduli of up to 1020 GPa for these nanocrystalline films. The intrinsic vertical and horizontal stress remains in most cases below the detection limit of 5 MPa, so that freestanding structures with a length of several millimeters can be fabricated without noticeable bending. (© 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)" @default.
- W2016122579 created "2016-06-24" @default.
- W2016122579 creator A5045175462 @default.
- W2016122579 creator A5060961932 @default.
- W2016122579 creator A5069337263 @default.
- W2016122579 creator A5070789672 @default.
- W2016122579 date "2004-09-01" @default.
- W2016122579 modified "2023-09-26" @default.
- W2016122579 title "Nanocrystalline diamond films for mechanical applications" @default.
- W2016122579 doi "https://doi.org/10.1002/pssa.200405173" @default.
- W2016122579 hasPublicationYear "2004" @default.
- W2016122579 type Work @default.
- W2016122579 sameAs 2016122579 @default.
- W2016122579 citedByCount "20" @default.
- W2016122579 countsByYear W20161225792013 @default.
- W2016122579 countsByYear W20161225792014 @default.
- W2016122579 countsByYear W20161225792016 @default.
- W2016122579 countsByYear W20161225792017 @default.
- W2016122579 countsByYear W20161225792018 @default.
- W2016122579 countsByYear W20161225792020 @default.
- W2016122579 crossrefType "journal-article" @default.
- W2016122579 hasAuthorship W2016122579A5045175462 @default.
- W2016122579 hasAuthorship W2016122579A5060961932 @default.
- W2016122579 hasAuthorship W2016122579A5069337263 @default.
- W2016122579 hasAuthorship W2016122579A5070789672 @default.
- W2016122579 hasConcept C140676511 @default.
- W2016122579 hasConcept C159985019 @default.
- W2016122579 hasConcept C160671074 @default.
- W2016122579 hasConcept C162882748 @default.
- W2016122579 hasConcept C171250308 @default.
- W2016122579 hasConcept C178790620 @default.
- W2016122579 hasConcept C185592680 @default.
- W2016122579 hasConcept C191897082 @default.
- W2016122579 hasConcept C192191005 @default.
- W2016122579 hasConcept C192562407 @default.
- W2016122579 hasConcept C2776921476 @default.
- W2016122579 hasConcept C544956773 @default.
- W2016122579 hasConcept C57410435 @default.
- W2016122579 hasConcept C61048295 @default.
- W2016122579 hasConceptScore W2016122579C140676511 @default.
- W2016122579 hasConceptScore W2016122579C159985019 @default.
- W2016122579 hasConceptScore W2016122579C160671074 @default.
- W2016122579 hasConceptScore W2016122579C162882748 @default.
- W2016122579 hasConceptScore W2016122579C171250308 @default.
- W2016122579 hasConceptScore W2016122579C178790620 @default.
- W2016122579 hasConceptScore W2016122579C185592680 @default.
- W2016122579 hasConceptScore W2016122579C191897082 @default.
- W2016122579 hasConceptScore W2016122579C192191005 @default.
- W2016122579 hasConceptScore W2016122579C192562407 @default.
- W2016122579 hasConceptScore W2016122579C2776921476 @default.
- W2016122579 hasConceptScore W2016122579C544956773 @default.
- W2016122579 hasConceptScore W2016122579C57410435 @default.
- W2016122579 hasConceptScore W2016122579C61048295 @default.
- W2016122579 hasIssue "11" @default.
- W2016122579 hasLocation W20161225791 @default.
- W2016122579 hasOpenAccess W2016122579 @default.
- W2016122579 hasPrimaryLocation W20161225791 @default.
- W2016122579 hasRelatedWork W1601960873 @default.
- W2016122579 hasRelatedWork W1643789723 @default.
- W2016122579 hasRelatedWork W1975353058 @default.
- W2016122579 hasRelatedWork W2017137898 @default.
- W2016122579 hasRelatedWork W2019433060 @default.
- W2016122579 hasRelatedWork W2031241386 @default.
- W2016122579 hasRelatedWork W2034663772 @default.
- W2016122579 hasRelatedWork W2037497935 @default.
- W2016122579 hasRelatedWork W2043260813 @default.
- W2016122579 hasRelatedWork W2064823740 @default.
- W2016122579 hasVolume "201" @default.
- W2016122579 isParatext "false" @default.
- W2016122579 isRetracted "false" @default.
- W2016122579 magId "2016122579" @default.
- W2016122579 workType "article" @default.