Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016153863> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W2016153863 endingPage "626" @default.
- W2016153863 startingPage "623" @default.
- W2016153863 abstract "We examined how the addition of different metal buffer layers between the Ni/Fe-alloy-catalyst layer and the silicon substrate affected the growth of nanostructured carbon films; Cr, Ti, Ta, and W were tested as buffer layers. Even when the sputter-deposition of catalytic-metal layers and the hot filament chemical vapor deposition of carbon films were carried out under the identical conditions, different buffer layers resulted in substantially different carbon-film growth. More specifically, carbon-nanoparticle films were produced with the Cr and the W buffer layers, and carbon-nanotube films were produced with the Ti and the Ta buffer layers. X-ray diffraction (XRD) showed a significant and systematic difference between the carbon-nanoparticle and carbon-nanotube films. In the case of the carbon-nanoparticle films deposited with either the Cr or the W buffer layer, the peaks corresponding to the catalytic metal, the carbide phases of the catalytic metal, and the carbide phases of the respective buffer metal were observed. However, in the case of the carbon-nanotube films deposited with either the Ti or the Ta buffer layer, the peaks corresponding to the carbide phases of the catalytic metal and the silicide phases of the respective buffer metal were observed. Moreover, scanning electron microscopy (SEM) images of the cross sections of the films showed the difference in the interface structure and its deposition-time-dependent change. Based on the XRD and cross-section SEM observations, we proposed a model that could account for the growth of different nanostructured carbon films on the different sets of buffer layers." @default.
- W2016153863 created "2016-06-24" @default.
- W2016153863 creator A5032096057 @default.
- W2016153863 creator A5033913383 @default.
- W2016153863 creator A5042013159 @default.
- W2016153863 creator A5050054139 @default.
- W2016153863 creator A5054498826 @default.
- W2016153863 creator A5063326703 @default.
- W2016153863 creator A5091602017 @default.
- W2016153863 date "2003-01-01" @default.
- W2016153863 modified "2023-10-18" @default.
- W2016153863 title "Effects of metal buffer layers on the hot filament chemical vapor deposition of nanostructured carbon films" @default.
- W2016153863 cites W1989006480 @default.
- W2016153863 cites W2003877271 @default.
- W2016153863 cites W2008113487 @default.
- W2016153863 cites W2023897068 @default.
- W2016153863 cites W2030033169 @default.
- W2016153863 cites W2043189251 @default.
- W2016153863 cites W2047909290 @default.
- W2016153863 cites W2049273511 @default.
- W2016153863 cites W2055776808 @default.
- W2016153863 doi "https://doi.org/10.1116/1.1524136" @default.
- W2016153863 hasPublicationYear "2003" @default.
- W2016153863 type Work @default.
- W2016153863 sameAs 2016153863 @default.
- W2016153863 citedByCount "24" @default.
- W2016153863 countsByYear W20161538632015 @default.
- W2016153863 countsByYear W20161538632017 @default.
- W2016153863 countsByYear W20161538632018 @default.
- W2016153863 countsByYear W20161538632019 @default.
- W2016153863 crossrefType "journal-article" @default.
- W2016153863 hasAuthorship W2016153863A5032096057 @default.
- W2016153863 hasAuthorship W2016153863A5033913383 @default.
- W2016153863 hasAuthorship W2016153863A5042013159 @default.
- W2016153863 hasAuthorship W2016153863A5050054139 @default.
- W2016153863 hasAuthorship W2016153863A5054498826 @default.
- W2016153863 hasAuthorship W2016153863A5063326703 @default.
- W2016153863 hasAuthorship W2016153863A5091602017 @default.
- W2016153863 hasConcept C104779481 @default.
- W2016153863 hasConcept C127413603 @default.
- W2016153863 hasConcept C140205800 @default.
- W2016153863 hasConcept C155672457 @default.
- W2016153863 hasConcept C159985019 @default.
- W2016153863 hasConcept C171250308 @default.
- W2016153863 hasConcept C177367955 @default.
- W2016153863 hasConcept C19067145 @default.
- W2016153863 hasConcept C192562407 @default.
- W2016153863 hasConcept C26771246 @default.
- W2016153863 hasConcept C2779227376 @default.
- W2016153863 hasConcept C2780901251 @default.
- W2016153863 hasConcept C42360764 @default.
- W2016153863 hasConcept C513720949 @default.
- W2016153863 hasConcept C57410435 @default.
- W2016153863 hasConcept C72045907 @default.
- W2016153863 hasConcept C75937256 @default.
- W2016153863 hasConceptScore W2016153863C104779481 @default.
- W2016153863 hasConceptScore W2016153863C127413603 @default.
- W2016153863 hasConceptScore W2016153863C140205800 @default.
- W2016153863 hasConceptScore W2016153863C155672457 @default.
- W2016153863 hasConceptScore W2016153863C159985019 @default.
- W2016153863 hasConceptScore W2016153863C171250308 @default.
- W2016153863 hasConceptScore W2016153863C177367955 @default.
- W2016153863 hasConceptScore W2016153863C19067145 @default.
- W2016153863 hasConceptScore W2016153863C192562407 @default.
- W2016153863 hasConceptScore W2016153863C26771246 @default.
- W2016153863 hasConceptScore W2016153863C2779227376 @default.
- W2016153863 hasConceptScore W2016153863C2780901251 @default.
- W2016153863 hasConceptScore W2016153863C42360764 @default.
- W2016153863 hasConceptScore W2016153863C513720949 @default.
- W2016153863 hasConceptScore W2016153863C57410435 @default.
- W2016153863 hasConceptScore W2016153863C72045907 @default.
- W2016153863 hasConceptScore W2016153863C75937256 @default.
- W2016153863 hasIssue "1" @default.
- W2016153863 hasLocation W20161538631 @default.
- W2016153863 hasOpenAccess W2016153863 @default.
- W2016153863 hasPrimaryLocation W20161538631 @default.
- W2016153863 hasRelatedWork W1984342254 @default.
- W2016153863 hasRelatedWork W2015565301 @default.
- W2016153863 hasRelatedWork W2019483583 @default.
- W2016153863 hasRelatedWork W2035865596 @default.
- W2016153863 hasRelatedWork W2069007854 @default.
- W2016153863 hasRelatedWork W2077839378 @default.
- W2016153863 hasRelatedWork W2138375871 @default.
- W2016153863 hasRelatedWork W2165216176 @default.
- W2016153863 hasRelatedWork W2351705194 @default.
- W2016153863 hasRelatedWork W2384779034 @default.
- W2016153863 hasVolume "21" @default.
- W2016153863 isParatext "false" @default.
- W2016153863 isRetracted "false" @default.
- W2016153863 magId "2016153863" @default.
- W2016153863 workType "article" @default.