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- W2016153904 endingPage "174" @default.
- W2016153904 startingPage "171" @default.
- W2016153904 abstract "Diffractive optical elements (DOEs) are realized with various reliefs using e-beam lithography and existing methodes for the production of microelectronic components. Depending on the 3D-profile, diffraction efficiencies of more than 70% for DOEs with high numerical aperture of 0.5 were measured and aberration-free imaging was observed. In order to enhance the diffraction efficiency we present different methods for a flexible 3D-shaping of the resist mask for the dry etching process." @default.
- W2016153904 created "2016-06-24" @default.
- W2016153904 creator A5013326579 @default.
- W2016153904 creator A5022253514 @default.
- W2016153904 creator A5038568803 @default.
- W2016153904 creator A5045902080 @default.
- W2016153904 creator A5047498404 @default.
- W2016153904 date "1995-02-01" @default.
- W2016153904 modified "2023-09-26" @default.
- W2016153904 title "Efficiency enhancement of diffractive optical elements by variable relief profiling" @default.
- W2016153904 cites W1969831794 @default.
- W2016153904 doi "https://doi.org/10.1016/0167-9317(94)00082-6" @default.
- W2016153904 hasPublicationYear "1995" @default.
- W2016153904 type Work @default.
- W2016153904 sameAs 2016153904 @default.
- W2016153904 citedByCount "4" @default.
- W2016153904 crossrefType "journal-article" @default.
- W2016153904 hasAuthorship W2016153904A5013326579 @default.
- W2016153904 hasAuthorship W2016153904A5022253514 @default.
- W2016153904 hasAuthorship W2016153904A5038568803 @default.
- W2016153904 hasAuthorship W2016153904A5045902080 @default.
- W2016153904 hasAuthorship W2016153904A5047498404 @default.
- W2016153904 hasConcept C100460472 @default.
- W2016153904 hasConcept C105487726 @default.
- W2016153904 hasConcept C120665830 @default.
- W2016153904 hasConcept C121332964 @default.
- W2016153904 hasConcept C1291036 @default.
- W2016153904 hasConcept C159108749 @default.
- W2016153904 hasConcept C171250308 @default.
- W2016153904 hasConcept C18355248 @default.
- W2016153904 hasConcept C187937830 @default.
- W2016153904 hasConcept C192562407 @default.
- W2016153904 hasConcept C200274948 @default.
- W2016153904 hasConcept C204223013 @default.
- W2016153904 hasConcept C207114421 @default.
- W2016153904 hasConcept C2779227376 @default.
- W2016153904 hasConcept C49040817 @default.
- W2016153904 hasConcept C53524968 @default.
- W2016153904 hasConcept C6260449 @default.
- W2016153904 hasConceptScore W2016153904C100460472 @default.
- W2016153904 hasConceptScore W2016153904C105487726 @default.
- W2016153904 hasConceptScore W2016153904C120665830 @default.
- W2016153904 hasConceptScore W2016153904C121332964 @default.
- W2016153904 hasConceptScore W2016153904C1291036 @default.
- W2016153904 hasConceptScore W2016153904C159108749 @default.
- W2016153904 hasConceptScore W2016153904C171250308 @default.
- W2016153904 hasConceptScore W2016153904C18355248 @default.
- W2016153904 hasConceptScore W2016153904C187937830 @default.
- W2016153904 hasConceptScore W2016153904C192562407 @default.
- W2016153904 hasConceptScore W2016153904C200274948 @default.
- W2016153904 hasConceptScore W2016153904C204223013 @default.
- W2016153904 hasConceptScore W2016153904C207114421 @default.
- W2016153904 hasConceptScore W2016153904C2779227376 @default.
- W2016153904 hasConceptScore W2016153904C49040817 @default.
- W2016153904 hasConceptScore W2016153904C53524968 @default.
- W2016153904 hasConceptScore W2016153904C6260449 @default.
- W2016153904 hasIssue "1-4" @default.
- W2016153904 hasLocation W20161539041 @default.
- W2016153904 hasOpenAccess W2016153904 @default.
- W2016153904 hasPrimaryLocation W20161539041 @default.
- W2016153904 hasRelatedWork W195596133 @default.
- W2016153904 hasRelatedWork W2003531181 @default.
- W2016153904 hasRelatedWork W2005900394 @default.
- W2016153904 hasRelatedWork W2016153904 @default.
- W2016153904 hasRelatedWork W2021685851 @default.
- W2016153904 hasRelatedWork W2023356181 @default.
- W2016153904 hasRelatedWork W2086192120 @default.
- W2016153904 hasRelatedWork W2207183411 @default.
- W2016153904 hasRelatedWork W2990232199 @default.
- W2016153904 hasRelatedWork W3021341094 @default.
- W2016153904 hasVolume "27" @default.
- W2016153904 isParatext "false" @default.
- W2016153904 isRetracted "false" @default.
- W2016153904 magId "2016153904" @default.
- W2016153904 workType "article" @default.