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- W2016177136 abstract "The optical proximity effect correction algorithm (OPERA) program based on the Monte-Carlo method has been used for optical proximity correction (OPC) and phase shift mask (PSM) generation for low-NA projection lithography systems. To apply OPERA to high-NA systems, we adopted an imaging model based on a vector diffraction theory. Also, we developed a new convergence algorithm that does not reduce the degree of freedom and prevents the convergence process from falling into a local minimum. The new program, OPERA-V, is at least 10 times faster than the previous version. OPERA-V not only improves the computation time of traditional OPC, but can also be used as an automatic design tool for creating chromeless PSMs." @default.
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- W2016177136 date "2004-02-10" @default.
- W2016177136 modified "2023-09-23" @default.
- W2016177136 title "Monte-Carlo-Based Automatic Design of Chromeless Phase Shift Mask" @default.
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- W2016177136 doi "https://doi.org/10.1143/jjap.43.514" @default.
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