Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016203892> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2016203892 endingPage "1858" @default.
- W2016203892 startingPage "1855" @default.
- W2016203892 abstract "A practical technology for self-aligned Si-Zn diffusion into GaAs and AlGaAs has been developed. It is found that the use of a Si film alone for self-aligned Si-Zn diffusion is subject to serious problems of morphology degradation and doping contamination during the process of the Si diffusion. A procedure combining the use of a SiO2 film as an encapsulant with a sputtered Si film as source for Si diffusion and mask for Zn diffusion is investigated in detail. Optimum thicknesses of the Si and SiO2 films are determined to be 180 and 550 Å, respectively." @default.
- W2016203892 created "2016-06-24" @default.
- W2016203892 creator A5002185419 @default.
- W2016203892 creator A5009837711 @default.
- W2016203892 creator A5024432134 @default.
- W2016203892 creator A5030453666 @default.
- W2016203892 creator A5040761641 @default.
- W2016203892 creator A5046983737 @default.
- W2016203892 date "1988-08-15" @default.
- W2016203892 modified "2023-10-16" @default.
- W2016203892 title "Self-aligned Si-Zn diffusion into GaAs and AlGaAs" @default.
- W2016203892 cites W1973167373 @default.
- W2016203892 cites W1994308560 @default.
- W2016203892 cites W2009802998 @default.
- W2016203892 cites W2036800539 @default.
- W2016203892 cites W2067981249 @default.
- W2016203892 cites W2078613115 @default.
- W2016203892 cites W2088816379 @default.
- W2016203892 cites W2092703562 @default.
- W2016203892 cites W2094175229 @default.
- W2016203892 cites W2124197320 @default.
- W2016203892 doi "https://doi.org/10.1063/1.341761" @default.
- W2016203892 hasPublicationYear "1988" @default.
- W2016203892 type Work @default.
- W2016203892 sameAs 2016203892 @default.
- W2016203892 citedByCount "7" @default.
- W2016203892 crossrefType "journal-article" @default.
- W2016203892 hasAuthorship W2016203892A5002185419 @default.
- W2016203892 hasAuthorship W2016203892A5009837711 @default.
- W2016203892 hasAuthorship W2016203892A5024432134 @default.
- W2016203892 hasAuthorship W2016203892A5030453666 @default.
- W2016203892 hasAuthorship W2016203892A5040761641 @default.
- W2016203892 hasAuthorship W2016203892A5046983737 @default.
- W2016203892 hasConcept C113196181 @default.
- W2016203892 hasConcept C121332964 @default.
- W2016203892 hasConcept C185592680 @default.
- W2016203892 hasConcept C191897082 @default.
- W2016203892 hasConcept C192562407 @default.
- W2016203892 hasConcept C2911124769 @default.
- W2016203892 hasConcept C3017618536 @default.
- W2016203892 hasConcept C41008148 @default.
- W2016203892 hasConcept C43617362 @default.
- W2016203892 hasConcept C49040817 @default.
- W2016203892 hasConcept C535196362 @default.
- W2016203892 hasConcept C544956773 @default.
- W2016203892 hasConcept C56739046 @default.
- W2016203892 hasConcept C57863236 @default.
- W2016203892 hasConcept C68710425 @default.
- W2016203892 hasConcept C69357855 @default.
- W2016203892 hasConcept C97355855 @default.
- W2016203892 hasConceptScore W2016203892C113196181 @default.
- W2016203892 hasConceptScore W2016203892C121332964 @default.
- W2016203892 hasConceptScore W2016203892C185592680 @default.
- W2016203892 hasConceptScore W2016203892C191897082 @default.
- W2016203892 hasConceptScore W2016203892C192562407 @default.
- W2016203892 hasConceptScore W2016203892C2911124769 @default.
- W2016203892 hasConceptScore W2016203892C3017618536 @default.
- W2016203892 hasConceptScore W2016203892C41008148 @default.
- W2016203892 hasConceptScore W2016203892C43617362 @default.
- W2016203892 hasConceptScore W2016203892C49040817 @default.
- W2016203892 hasConceptScore W2016203892C535196362 @default.
- W2016203892 hasConceptScore W2016203892C544956773 @default.
- W2016203892 hasConceptScore W2016203892C56739046 @default.
- W2016203892 hasConceptScore W2016203892C57863236 @default.
- W2016203892 hasConceptScore W2016203892C68710425 @default.
- W2016203892 hasConceptScore W2016203892C69357855 @default.
- W2016203892 hasConceptScore W2016203892C97355855 @default.
- W2016203892 hasIssue "4" @default.
- W2016203892 hasLocation W20162038921 @default.
- W2016203892 hasOpenAccess W2016203892 @default.
- W2016203892 hasPrimaryLocation W20162038921 @default.
- W2016203892 hasRelatedWork W1992145241 @default.
- W2016203892 hasRelatedWork W2009548931 @default.
- W2016203892 hasRelatedWork W2011857888 @default.
- W2016203892 hasRelatedWork W2042127189 @default.
- W2016203892 hasRelatedWork W2057662999 @default.
- W2016203892 hasRelatedWork W2085560456 @default.
- W2016203892 hasRelatedWork W2122607633 @default.
- W2016203892 hasRelatedWork W2885787266 @default.
- W2016203892 hasRelatedWork W3100447501 @default.
- W2016203892 hasRelatedWork W4297828600 @default.
- W2016203892 hasVolume "64" @default.
- W2016203892 isParatext "false" @default.
- W2016203892 isRetracted "false" @default.
- W2016203892 magId "2016203892" @default.
- W2016203892 workType "article" @default.