Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016269641> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W2016269641 endingPage "586" @default.
- W2016269641 startingPage "583" @default.
- W2016269641 abstract "Abstract We report the fabrication of nanometer-scale conducting silicon wires by the STM-induced modification of a passivated silicon (100) surface followed by a selective liquid etch. The modified surface layer is a thin oxide a few monolayers thick which acts as a mask against subsequent liquid etching of the unmodified regions of the silicon surface. Silicon wires as narrow as 30 nm have been fabricated with this technique. More complicated patterns can be written by selectively pulsing the STM bias to a suitable writing voltage pixel-by-pixel during a low-bias (hence non-exposing) scan. The maximum pattern size is limited by the range of the piezoscanners, which for our system is in excess of 100 μm. Conducting silicon wires between contact pads were fabricated on a silicon layer on top of a buried insulating layer of SiO 2 formed by oxygen implantation and subsequent anneal (SIMOX). Backgating of these structures can drive them either into accumulation or inversion, thus allowing independent control of their conductance and carrier type. The techniques described here allow the simple, easy, and reliable fabrication of nanometer-scale devices using relatively inexpensive and widely available equipment." @default.
- W2016269641 created "2016-06-24" @default.
- W2016269641 creator A5029380275 @default.
- W2016269641 creator A5043045350 @default.
- W2016269641 creator A5060304371 @default.
- W2016269641 date "1994-04-01" @default.
- W2016269641 modified "2023-10-03" @default.
- W2016269641 title "Fabrication of nanometer-scale conducting silicon wires with a scanning tunneling microscope" @default.
- W2016269641 cites W1964440124 @default.
- W2016269641 cites W1965702561 @default.
- W2016269641 cites W1969181886 @default.
- W2016269641 cites W1970588492 @default.
- W2016269641 cites W2005726924 @default.
- W2016269641 cites W2013650917 @default.
- W2016269641 cites W2027978202 @default.
- W2016269641 cites W2028987083 @default.
- W2016269641 cites W2064225588 @default.
- W2016269641 cites W2064781970 @default.
- W2016269641 cites W2071947655 @default.
- W2016269641 cites W2083527619 @default.
- W2016269641 cites W2131191287 @default.
- W2016269641 doi "https://doi.org/10.1016/0038-1101(94)90252-6" @default.
- W2016269641 hasPublicationYear "1994" @default.
- W2016269641 type Work @default.
- W2016269641 sameAs 2016269641 @default.
- W2016269641 citedByCount "16" @default.
- W2016269641 crossrefType "journal-article" @default.
- W2016269641 hasAuthorship W2016269641A5029380275 @default.
- W2016269641 hasAuthorship W2016269641A5043045350 @default.
- W2016269641 hasAuthorship W2016269641A5060304371 @default.
- W2016269641 hasConcept C120398109 @default.
- W2016269641 hasConcept C120665830 @default.
- W2016269641 hasConcept C121332964 @default.
- W2016269641 hasConcept C136525101 @default.
- W2016269641 hasConcept C142724271 @default.
- W2016269641 hasConcept C159985019 @default.
- W2016269641 hasConcept C171250308 @default.
- W2016269641 hasConcept C192562407 @default.
- W2016269641 hasConcept C194577767 @default.
- W2016269641 hasConcept C204787440 @default.
- W2016269641 hasConcept C2778755073 @default.
- W2016269641 hasConcept C36628996 @default.
- W2016269641 hasConcept C49040817 @default.
- W2016269641 hasConcept C5408304 @default.
- W2016269641 hasConcept C544956773 @default.
- W2016269641 hasConcept C62520636 @default.
- W2016269641 hasConcept C6518042 @default.
- W2016269641 hasConcept C67649825 @default.
- W2016269641 hasConcept C71924100 @default.
- W2016269641 hasConcept C77066764 @default.
- W2016269641 hasConceptScore W2016269641C120398109 @default.
- W2016269641 hasConceptScore W2016269641C120665830 @default.
- W2016269641 hasConceptScore W2016269641C121332964 @default.
- W2016269641 hasConceptScore W2016269641C136525101 @default.
- W2016269641 hasConceptScore W2016269641C142724271 @default.
- W2016269641 hasConceptScore W2016269641C159985019 @default.
- W2016269641 hasConceptScore W2016269641C171250308 @default.
- W2016269641 hasConceptScore W2016269641C192562407 @default.
- W2016269641 hasConceptScore W2016269641C194577767 @default.
- W2016269641 hasConceptScore W2016269641C204787440 @default.
- W2016269641 hasConceptScore W2016269641C2778755073 @default.
- W2016269641 hasConceptScore W2016269641C36628996 @default.
- W2016269641 hasConceptScore W2016269641C49040817 @default.
- W2016269641 hasConceptScore W2016269641C5408304 @default.
- W2016269641 hasConceptScore W2016269641C544956773 @default.
- W2016269641 hasConceptScore W2016269641C62520636 @default.
- W2016269641 hasConceptScore W2016269641C6518042 @default.
- W2016269641 hasConceptScore W2016269641C67649825 @default.
- W2016269641 hasConceptScore W2016269641C71924100 @default.
- W2016269641 hasConceptScore W2016269641C77066764 @default.
- W2016269641 hasIssue "4-6" @default.
- W2016269641 hasLocation W20162696411 @default.
- W2016269641 hasOpenAccess W2016269641 @default.
- W2016269641 hasPrimaryLocation W20162696411 @default.
- W2016269641 hasRelatedWork W147835182 @default.
- W2016269641 hasRelatedWork W1964440124 @default.
- W2016269641 hasRelatedWork W1966714437 @default.
- W2016269641 hasRelatedWork W1975407605 @default.
- W2016269641 hasRelatedWork W1993652400 @default.
- W2016269641 hasRelatedWork W2017164474 @default.
- W2016269641 hasRelatedWork W2035670793 @default.
- W2016269641 hasRelatedWork W2069284921 @default.
- W2016269641 hasRelatedWork W2085165260 @default.
- W2016269641 hasRelatedWork W2381245164 @default.
- W2016269641 hasVolume "37" @default.
- W2016269641 isParatext "false" @default.
- W2016269641 isRetracted "false" @default.
- W2016269641 magId "2016269641" @default.
- W2016269641 workType "article" @default.