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- W2016290247 abstract "The Schottky barrier height (SBH) of NiSi on Si(100) was tuned in a controlled manner by the segregation of sulfur (S) to the silicide∕silicon interface. S was implanted into silicon prior to silicidation. During subsequent Ni silicidation, the segregation of S at the NiSi∕Si interface leads to the change of the SBH. The SBH of NiSi decreased gradually on n-Si(100) from 0.65eV to 0.07eV and increased correspondingly on p-Si(100)." @default.
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- W2016290247 date "2005-02-02" @default.
- W2016290247 modified "2023-09-25" @default.
- W2016290247 title "Tuning of NiSi∕Si Schottky barrier heights by sulfur segregation during Ni silicidation" @default.
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- W2016290247 doi "https://doi.org/10.1063/1.1863442" @default.
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