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- W2016302642 abstract "GaAs substrates were anodized in the (NH 4 ) 2 SO 4 electrolyte with various fluoride concentrations. Scanning electron microscope (SEM) observation showed that highly regular honeycomb hollows were formed on the substrates anodized in the (NH 4 ) 2 SO 4 electrolyte with a small amount of HF concentration. The regularity of hollows decreased with the increase of HF concentration. The average diameter of hollows increased with increasing anodizing voltage. The regularity of hollow diameters increased with the increase of anodizing time, irrespective of the anodizing voltage. Cross-sectional SEM image showed that the average depth of regular hollows was about 5 nm. In addition to the peak in the region of fundamental adsorption of GaAs with the peak wavelength at about 870 nm, photoluminescence spectra of samples anodized in the (NH 4 ) 2 SO 4 electrolyte with HF concentration of 0.5 ml showed several peaks at about 610, 635, 670 and 720 nm. • We report on the electrochemical formation of GaAs honeycomb structure. • High regular hollows were formed by anodization in HF-containing (NH 4 ) 2 SO 4 solution. • A thin porous layer was formed by anodization in HF-containing (NH 4 ) 2 SO 4 solution. • This process is useful for preparing patterned substrate with a thin porous layer." @default.
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- W2016302642 date "2014-04-01" @default.
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- W2016302642 title "Electrochemical formation of GaAs honeycomb structure using a fluoride-containing (NH4)2SO4 solution" @default.
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- W2016302642 doi "https://doi.org/10.1016/j.tsf.2014.02.040" @default.
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