Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016303397> ?p ?o ?g. }
Showing items 1 to 88 of
88
with 100 items per page.
- W2016303397 abstract "The purpose of this experiment was to assess the importance of electrostatic attraction in contamination control in a semiconductor fab. Wafer handling was studied in a cryogenic cleaning tool in a working 300-millimeter (mm) fab in the United States. The particles per wafer pass (PWP, >200 nanometers [nm]) was reduced from 0.455±0.058 to 0.245±0.046 through the use of air ionization. While the tool is one of the cleanest in the fab, the tool still exhibited a large percentage improvement in contamination level by the addition of air ionization." @default.
- W2016303397 created "2016-06-24" @default.
- W2016303397 creator A5044899113 @default.
- W2016303397 date "2008-04-01" @default.
- W2016303397 modified "2023-09-27" @default.
- W2016303397 title "Measuring the PWP Improvement in the Handling Component of a Semiconductor Process Tool from Air Ionization" @default.
- W2016303397 doi "https://doi.org/10.17764/jiet.51.1.9352066v41411312" @default.
- W2016303397 hasPublicationYear "2008" @default.
- W2016303397 type Work @default.
- W2016303397 sameAs 2016303397 @default.
- W2016303397 citedByCount "0" @default.
- W2016303397 crossrefType "journal-article" @default.
- W2016303397 hasAuthorship W2016303397A5044899113 @default.
- W2016303397 hasConcept C108225325 @default.
- W2016303397 hasConcept C112570922 @default.
- W2016303397 hasConcept C113196181 @default.
- W2016303397 hasConcept C119599485 @default.
- W2016303397 hasConcept C127094628 @default.
- W2016303397 hasConcept C127413603 @default.
- W2016303397 hasConcept C145148216 @default.
- W2016303397 hasConcept C159985019 @default.
- W2016303397 hasConcept C160671074 @default.
- W2016303397 hasConcept C165801399 @default.
- W2016303397 hasConcept C171250308 @default.
- W2016303397 hasConcept C178790620 @default.
- W2016303397 hasConcept C185592680 @default.
- W2016303397 hasConcept C18903297 @default.
- W2016303397 hasConcept C192562407 @default.
- W2016303397 hasConcept C198291218 @default.
- W2016303397 hasConcept C205483674 @default.
- W2016303397 hasConcept C39432304 @default.
- W2016303397 hasConcept C43617362 @default.
- W2016303397 hasConcept C49040817 @default.
- W2016303397 hasConcept C66018809 @default.
- W2016303397 hasConcept C77066764 @default.
- W2016303397 hasConcept C86803240 @default.
- W2016303397 hasConcept C93497512 @default.
- W2016303397 hasConceptScore W2016303397C108225325 @default.
- W2016303397 hasConceptScore W2016303397C112570922 @default.
- W2016303397 hasConceptScore W2016303397C113196181 @default.
- W2016303397 hasConceptScore W2016303397C119599485 @default.
- W2016303397 hasConceptScore W2016303397C127094628 @default.
- W2016303397 hasConceptScore W2016303397C127413603 @default.
- W2016303397 hasConceptScore W2016303397C145148216 @default.
- W2016303397 hasConceptScore W2016303397C159985019 @default.
- W2016303397 hasConceptScore W2016303397C160671074 @default.
- W2016303397 hasConceptScore W2016303397C165801399 @default.
- W2016303397 hasConceptScore W2016303397C171250308 @default.
- W2016303397 hasConceptScore W2016303397C178790620 @default.
- W2016303397 hasConceptScore W2016303397C185592680 @default.
- W2016303397 hasConceptScore W2016303397C18903297 @default.
- W2016303397 hasConceptScore W2016303397C192562407 @default.
- W2016303397 hasConceptScore W2016303397C198291218 @default.
- W2016303397 hasConceptScore W2016303397C205483674 @default.
- W2016303397 hasConceptScore W2016303397C39432304 @default.
- W2016303397 hasConceptScore W2016303397C43617362 @default.
- W2016303397 hasConceptScore W2016303397C49040817 @default.
- W2016303397 hasConceptScore W2016303397C66018809 @default.
- W2016303397 hasConceptScore W2016303397C77066764 @default.
- W2016303397 hasConceptScore W2016303397C86803240 @default.
- W2016303397 hasConceptScore W2016303397C93497512 @default.
- W2016303397 hasLocation W20163033971 @default.
- W2016303397 hasOpenAccess W2016303397 @default.
- W2016303397 hasPrimaryLocation W20163033971 @default.
- W2016303397 hasRelatedWork W1557550684 @default.
- W2016303397 hasRelatedWork W1585447412 @default.
- W2016303397 hasRelatedWork W1983621193 @default.
- W2016303397 hasRelatedWork W1986326681 @default.
- W2016303397 hasRelatedWork W2004023050 @default.
- W2016303397 hasRelatedWork W2071930718 @default.
- W2016303397 hasRelatedWork W2072082102 @default.
- W2016303397 hasRelatedWork W2081899429 @default.
- W2016303397 hasRelatedWork W2144327030 @default.
- W2016303397 hasRelatedWork W2164313696 @default.
- W2016303397 hasRelatedWork W2183657198 @default.
- W2016303397 hasRelatedWork W2406344701 @default.
- W2016303397 hasRelatedWork W2540326333 @default.
- W2016303397 hasRelatedWork W2540698391 @default.
- W2016303397 hasRelatedWork W2587956899 @default.
- W2016303397 hasRelatedWork W2747004222 @default.
- W2016303397 hasRelatedWork W2993795579 @default.
- W2016303397 hasRelatedWork W427288698 @default.
- W2016303397 hasRelatedWork W2774162939 @default.
- W2016303397 hasRelatedWork W3144913482 @default.
- W2016303397 isParatext "false" @default.
- W2016303397 isRetracted "false" @default.
- W2016303397 magId "2016303397" @default.
- W2016303397 workType "article" @default.