Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016342374> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W2016342374 endingPage "125" @default.
- W2016342374 startingPage "123" @default.
- W2016342374 abstract "A new approach to electron beam lithography for device fabrications is described. This technique transfers relief images formed at the superficial layer of a positive resist inversely to the bottom layer of the resist. The technique can drastically improve the resolution and linewidth accuracy of delineated patterns by reducing proximity effects and the influence of incident beam spread. Writing time can also be reduced. 0.2-μm very large scale integration patterns and feature with 250-Å linewidth less than the incident beam size have been successfully produced." @default.
- W2016342374 created "2016-06-24" @default.
- W2016342374 creator A5019191680 @default.
- W2016342374 creator A5048967200 @default.
- W2016342374 creator A5077808503 @default.
- W2016342374 date "1985-07-15" @default.
- W2016342374 modified "2023-09-24" @default.
- W2016342374 title "Superficial image emphasis lithography" @default.
- W2016342374 cites W1975617774 @default.
- W2016342374 doi "https://doi.org/10.1063/1.96235" @default.
- W2016342374 hasPublicationYear "1985" @default.
- W2016342374 type Work @default.
- W2016342374 sameAs 2016342374 @default.
- W2016342374 citedByCount "6" @default.
- W2016342374 crossrefType "journal-article" @default.
- W2016342374 hasAuthorship W2016342374A5019191680 @default.
- W2016342374 hasAuthorship W2016342374A5048967200 @default.
- W2016342374 hasAuthorship W2016342374A5077808503 @default.
- W2016342374 hasConcept C105487726 @default.
- W2016342374 hasConcept C120665830 @default.
- W2016342374 hasConcept C121332964 @default.
- W2016342374 hasConcept C138268822 @default.
- W2016342374 hasConcept C138885662 @default.
- W2016342374 hasConcept C142181693 @default.
- W2016342374 hasConcept C154945302 @default.
- W2016342374 hasConcept C163581340 @default.
- W2016342374 hasConcept C168834538 @default.
- W2016342374 hasConcept C171250308 @default.
- W2016342374 hasConcept C177454536 @default.
- W2016342374 hasConcept C192562407 @default.
- W2016342374 hasConcept C200274948 @default.
- W2016342374 hasConcept C204223013 @default.
- W2016342374 hasConcept C2776401178 @default.
- W2016342374 hasConcept C2777953097 @default.
- W2016342374 hasConcept C2779227376 @default.
- W2016342374 hasConcept C41008148 @default.
- W2016342374 hasConcept C41794268 @default.
- W2016342374 hasConcept C41895202 @default.
- W2016342374 hasConcept C49040817 @default.
- W2016342374 hasConcept C520434653 @default.
- W2016342374 hasConcept C53524968 @default.
- W2016342374 hasConcept C70520399 @default.
- W2016342374 hasConcept C76155785 @default.
- W2016342374 hasConceptScore W2016342374C105487726 @default.
- W2016342374 hasConceptScore W2016342374C120665830 @default.
- W2016342374 hasConceptScore W2016342374C121332964 @default.
- W2016342374 hasConceptScore W2016342374C138268822 @default.
- W2016342374 hasConceptScore W2016342374C138885662 @default.
- W2016342374 hasConceptScore W2016342374C142181693 @default.
- W2016342374 hasConceptScore W2016342374C154945302 @default.
- W2016342374 hasConceptScore W2016342374C163581340 @default.
- W2016342374 hasConceptScore W2016342374C168834538 @default.
- W2016342374 hasConceptScore W2016342374C171250308 @default.
- W2016342374 hasConceptScore W2016342374C177454536 @default.
- W2016342374 hasConceptScore W2016342374C192562407 @default.
- W2016342374 hasConceptScore W2016342374C200274948 @default.
- W2016342374 hasConceptScore W2016342374C204223013 @default.
- W2016342374 hasConceptScore W2016342374C2776401178 @default.
- W2016342374 hasConceptScore W2016342374C2777953097 @default.
- W2016342374 hasConceptScore W2016342374C2779227376 @default.
- W2016342374 hasConceptScore W2016342374C41008148 @default.
- W2016342374 hasConceptScore W2016342374C41794268 @default.
- W2016342374 hasConceptScore W2016342374C41895202 @default.
- W2016342374 hasConceptScore W2016342374C49040817 @default.
- W2016342374 hasConceptScore W2016342374C520434653 @default.
- W2016342374 hasConceptScore W2016342374C53524968 @default.
- W2016342374 hasConceptScore W2016342374C70520399 @default.
- W2016342374 hasConceptScore W2016342374C76155785 @default.
- W2016342374 hasIssue "2" @default.
- W2016342374 hasLocation W20163423741 @default.
- W2016342374 hasOpenAccess W2016342374 @default.
- W2016342374 hasPrimaryLocation W20163423741 @default.
- W2016342374 hasRelatedWork W1978277210 @default.
- W2016342374 hasRelatedWork W1983850620 @default.
- W2016342374 hasRelatedWork W2007100303 @default.
- W2016342374 hasRelatedWork W2016342374 @default.
- W2016342374 hasRelatedWork W2022121633 @default.
- W2016342374 hasRelatedWork W2027599951 @default.
- W2016342374 hasRelatedWork W2087667468 @default.
- W2016342374 hasRelatedWork W2092257310 @default.
- W2016342374 hasRelatedWork W2145411830 @default.
- W2016342374 hasRelatedWork W3091884080 @default.
- W2016342374 hasVolume "47" @default.
- W2016342374 isParatext "false" @default.
- W2016342374 isRetracted "false" @default.
- W2016342374 magId "2016342374" @default.
- W2016342374 workType "article" @default.