FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016357166> ?p ?o ?g. }

• W2016357166 endingPage "1576" @default.
• W2016357166 startingPage "1571" @default.
• W2016357166 abstract "The ability to chemically characterize the contamination on silicon wafers is of critical importance to the semiconductor industry. It provides information on possible unwanted chemical processes taking place on the wafer surface and helps in determining the true source of the contamination problem. This type of information is not readily accessible with standard laboratory equipment. Synchrotron radiation-induced total reflection X-ray fluorescence (SR-TXRF) was combined with X-ray absorption near-edge structure (XANES) to determine the chemical state of Fe contaminations on a silicon wafer surface. Main purpose of the study was to test the method for a contamination issue as it could appear in a microelectronic VLSI production fab. Copyright © 2008 John Wiley & Sons, Ltd." @default.
• W2016357166 created "2016-06-24" @default.
• W2016357166 creator A5005599699 @default.
• W2016357166 creator A5013544617 @default.
• W2016357166 creator A5021904346 @default.
• W2016357166 creator A5056525643 @default.
• W2016357166 creator A5064346014 @default.
• W2016357166 creator A5076125719 @default.
• W2016357166 creator A5088963813 @default.
• W2016357166 date "2008-12-01" @default.
• W2016357166 modified "2023-09-27" @default.
• W2016357166 title "Feasibility study of SR-TXRF-XANES analysis for iron contaminations on a silicon wafer surface" @default.
• W2016357166 cites W1976530074 @default.
• W2016357166 cites W1978450379 @default.
• W2016357166 cites W1980164402 @default.
• W2016357166 cites W1988086790 @default.
• W2016357166 cites W2012242446 @default.
• W2016357166 cites W2013403741 @default.
• W2016357166 cites W2038677974 @default.
• W2016357166 cites W2047614983 @default.
• W2016357166 cites W2049226886 @default.
• W2016357166 cites W2064260938 @default.
• W2016357166 cites W2067246372 @default.
• W2016357166 cites W2070227796 @default.
• W2016357166 cites W2085705791 @default.
• W2016357166 cites W2088808023 @default.
• W2016357166 cites W2161907742 @default.
• W2016357166 doi "https://doi.org/10.1002/sia.2954" @default.
• W2016357166 hasPublicationYear "2008" @default.
• W2016357166 type Work @default.
• W2016357166 sameAs 2016357166 @default.
• W2016357166 citedByCount "8" @default.
• W2016357166 countsByYear W20163571662015 @default.
• W2016357166 countsByYear W20163571662018 @default.
• W2016357166 countsByYear W20163571662019 @default.
• W2016357166 crossrefType "journal-article" @default.
• W2016357166 hasAuthorship W2016357166A5005599699 @default.
• W2016357166 hasAuthorship W2016357166A5013544617 @default.
• W2016357166 hasAuthorship W2016357166A5021904346 @default.
• W2016357166 hasAuthorship W2016357166A5056525643 @default.
• W2016357166 hasAuthorship W2016357166A5064346014 @default.
• W2016357166 hasAuthorship W2016357166A5076125719 @default.
• W2016357166 hasAuthorship W2016357166A5088963813 @default.
• W2016357166 hasBestOaLocation W20163571662 @default.
• W2016357166 hasConcept C107872376 @default.
• W2016357166 hasConcept C108225325 @default.
• W2016357166 hasConcept C110715899 @default.
• W2016357166 hasConcept C112570922 @default.
• W2016357166 hasConcept C113196181 @default.
• W2016357166 hasConcept C120665830 @default.
• W2016357166 hasConcept C121332964 @default.
• W2016357166 hasConcept C160671074 @default.
• W2016357166 hasConcept C162170617 @default.
• W2016357166 hasConcept C16332341 @default.
• W2016357166 hasConcept C170395517 @default.
• W2016357166 hasConcept C171250308 @default.
• W2016357166 hasConcept C185592680 @default.
• W2016357166 hasConcept C187937830 @default.
• W2016357166 hasConcept C18903297 @default.
• W2016357166 hasConcept C192562407 @default.
• W2016357166 hasConcept C2779227376 @default.
• W2016357166 hasConcept C32891209 @default.
• W2016357166 hasConcept C49040817 @default.
• W2016357166 hasConcept C544956773 @default.
• W2016357166 hasConcept C62520636 @default.
• W2016357166 hasConcept C79635011 @default.
• W2016357166 hasConcept C86803240 @default.
• W2016357166 hasConcept C91881484 @default.
• W2016357166 hasConceptScore W2016357166C107872376 @default.
• W2016357166 hasConceptScore W2016357166C108225325 @default.
• W2016357166 hasConceptScore W2016357166C110715899 @default.
• W2016357166 hasConceptScore W2016357166C112570922 @default.
• W2016357166 hasConceptScore W2016357166C113196181 @default.
• W2016357166 hasConceptScore W2016357166C120665830 @default.
• W2016357166 hasConceptScore W2016357166C121332964 @default.
• W2016357166 hasConceptScore W2016357166C160671074 @default.
• W2016357166 hasConceptScore W2016357166C162170617 @default.
• W2016357166 hasConceptScore W2016357166C16332341 @default.
• W2016357166 hasConceptScore W2016357166C170395517 @default.
• W2016357166 hasConceptScore W2016357166C171250308 @default.
• W2016357166 hasConceptScore W2016357166C185592680 @default.
• W2016357166 hasConceptScore W2016357166C187937830 @default.
• W2016357166 hasConceptScore W2016357166C18903297 @default.
• W2016357166 hasConceptScore W2016357166C192562407 @default.
• W2016357166 hasConceptScore W2016357166C2779227376 @default.
• W2016357166 hasConceptScore W2016357166C32891209 @default.
• W2016357166 hasConceptScore W2016357166C49040817 @default.
• W2016357166 hasConceptScore W2016357166C544956773 @default.
• W2016357166 hasConceptScore W2016357166C62520636 @default.
• W2016357166 hasConceptScore W2016357166C79635011 @default.
• W2016357166 hasConceptScore W2016357166C86803240 @default.
• W2016357166 hasConceptScore W2016357166C91881484 @default.
• W2016357166 hasIssue "12" @default.
• W2016357166 hasLocation W20163571661 @default.
• W2016357166 hasLocation W20163571662 @default.
• W2016357166 hasOpenAccess W2016357166 @default.
• W2016357166 hasPrimaryLocation W20163571661 @default.
• W2016357166 hasRelatedWork W1519042206 @default.

• next