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• W2016362745 abstract "A silicon Mach-Zehnder modulator with a low-loss phase shifter formed by restricted-depth doping is fabricated and characterized. The phase shifter has a PN junction at the bottom of the rib waveguide, whereas the top of the rib is un-doped. Device simulations confirm that the phase-shifter loss is reduced by 26−28% with an increased phase-shifter length to keep a π phase shift with the same bias condition in comparison with a conventional PN junction through the whole depth. An optical loss as low as 1.6dB has been achieved in the fabricated phase shifter with a 6-mm length. The Mach-Zehnder modulator with the phase shifter has a fiber-to-fiber loss of 9dB. 10-Gbps non-return-to-zero on-off keying with extinction ratio of 11dB is demonstrated under push-pull operation with a 6Vpp driving voltage on each arm." @default.
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• W2016362745 date "2013-01-01" @default.
• W2016362745 modified "2023-09-24" @default.
• W2016362745 title "Silicon Mach-Zehnder modulator using low-loss phase shifter with bottom PN junction formed by restricted-depth doping" @default.
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• W2016362745 doi "https://doi.org/10.1587/elex.10.20130552" @default.
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