FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016440680> ?p ?o ?g. }

• W2016440680 abstract "In this study, we compare the deposition processes and surface properties of tetrahedral amorphous carbon (ta-C) films from filtered pulsed cathodic arc discharge (PCAD) and hydrogenated amorphous carbon (a-C:H) films from electron cyclotron resonance (ECR)-plasma source ion implantation. The ion energy distributions (IEDs) of filtered-PCAD at various filter inductances and Ar gas pressures were measured using an ion energy analyzer. The IEDs of the carbon species in the absence of background gas and at low gas pressures are well fitted by shifted Maxwellian distributions. Film hardness and surface properties show a clear dependence on the IEDs. ta-C films with surface roughness at an atomic level and thin (0.3–0.9 nm) graphitelike layers at the film surfaces were deposited at various filter inductances in the highly ionized plasmas with the full width at half maximum ion energy distributions of 9–16 eV. The a-C:H films deposited at higher H∕C ratios of reactive gases were covered with hydrogen and sp3 bonded carbon-enriched layers due to the simultaneous interaction of hydrocarbon species and atomic hydrogen. The effects of deposited species and ion energies on film surface properties were analyzed. Some carbon species have insufficient energies to break the delocalized π(nC) bonds at the graphitelike film surface, and they can govern film formation via surface diffusion and coalescence of nuclei. Dangling bonds created by atomic hydrogen lead to uniform chemisorption of hydrocarbon species from the ECR plasmas. The deposition processes of ta-C and a-C:H films are discussed on the basis of the experimental results." @default.
• W2016440680 created "2016-06-24" @default.
• W2016440680 creator A5009719661 @default.
• W2016440680 creator A5013454336 @default.
• W2016440680 creator A5016344450 @default.
• W2016440680 creator A5019114599 @default.
• W2016440680 creator A5024693956 @default.
• W2016440680 date "2005-04-28" @default.
• W2016440680 modified "2023-09-27" @default.
• W2016440680 title "Growth processes and surface properties of diamondlike carbon films" @default.
• W2016440680 cites W1964416944 @default.
• W2016440680 cites W1966994989 @default.
• W2016440680 cites W1978592901 @default.
• W2016440680 cites W1991599461 @default.
• W2016440680 cites W1992019714 @default.
• W2016440680 cites W1993936119 @default.
• W2016440680 cites W1994576708 @default.
• W2016440680 cites W1997944905 @default.
• W2016440680 cites W2001745768 @default.
• W2016440680 cites W2002500477 @default.
• W2016440680 cites W2003378338 @default.
• W2016440680 cites W2005125033 @default.
• W2016440680 cites W2008304445 @default.
• W2016440680 cites W2009136561 @default.
• W2016440680 cites W2014137241 @default.
• W2016440680 cites W2014175729 @default.
• W2016440680 cites W2014301655 @default.
• W2016440680 cites W2018261380 @default.
• W2016440680 cites W2018540099 @default.
• W2016440680 cites W2020904430 @default.
• W2016440680 cites W2022058961 @default.
• W2016440680 cites W2024973069 @default.
• W2016440680 cites W2026794308 @default.
• W2016440680 cites W2028054340 @default.
• W2016440680 cites W2029872799 @default.
• W2016440680 cites W2030142598 @default.
• W2016440680 cites W2031481123 @default.
• W2016440680 cites W2031986505 @default.
• W2016440680 cites W2035581207 @default.
• W2016440680 cites W2040777891 @default.
• W2016440680 cites W2045410939 @default.
• W2016440680 cites W2046217628 @default.
• W2016440680 cites W2048719419 @default.
• W2016440680 cites W2051607739 @default.
• W2016440680 cites W2054535076 @default.
• W2016440680 cites W2065471415 @default.
• W2016440680 cites W2067688359 @default.
• W2016440680 cites W2069846540 @default.
• W2016440680 cites W2071480900 @default.
• W2016440680 cites W2075643854 @default.
• W2016440680 cites W2080537945 @default.
• W2016440680 cites W2083855830 @default.
• W2016440680 cites W2084361732 @default.
• W2016440680 cites W2087696472 @default.
• W2016440680 cites W2090116919 @default.
• W2016440680 cites W2090825312 @default.
• W2016440680 cites W2090899346 @default.
• W2016440680 cites W2093735426 @default.
• W2016440680 cites W2098930887 @default.
• W2016440680 cites W2107402267 @default.
• W2016440680 cites W2109468230 @default.
• W2016440680 cites W2120553331 @default.
• W2016440680 cites W2137250615 @default.
• W2016440680 cites W2142676520 @default.
• W2016440680 cites W2159174698 @default.
• W2016440680 cites W39842790 @default.
• W2016440680 doi "https://doi.org/10.1063/1.1890446" @default.
• W2016440680 hasPublicationYear "2005" @default.
• W2016440680 type Work @default.
• W2016440680 sameAs 2016440680 @default.
• W2016440680 citedByCount "9" @default.
• W2016440680 countsByYear W20164406802014 @default.
• W2016440680 countsByYear W20164406802018 @default.
• W2016440680 countsByYear W20164406802020 @default.
• W2016440680 crossrefType "journal-article" @default.
• W2016440680 hasAuthorship W2016440680A5009719661 @default.
• W2016440680 hasAuthorship W2016440680A5013454336 @default.
• W2016440680 hasAuthorship W2016440680A5016344450 @default.
• W2016440680 hasAuthorship W2016440680A5019114599 @default.
• W2016440680 hasAuthorship W2016440680A5024693956 @default.
• W2016440680 hasConcept C104779481 @default.
• W2016440680 hasConcept C113196181 @default.
• W2016440680 hasConcept C121332964 @default.
• W2016440680 hasConcept C140205800 @default.
• W2016440680 hasConcept C145148216 @default.
• W2016440680 hasConcept C159985019 @default.
• W2016440680 hasConcept C171250308 @default.
• W2016440680 hasConcept C175361016 @default.
• W2016440680 hasConcept C178790620 @default.
• W2016440680 hasConcept C184779094 @default.
• W2016440680 hasConcept C185592680 @default.
• W2016440680 hasConcept C19067145 @default.
• W2016440680 hasConcept C192562407 @default.
• W2016440680 hasConcept C201931942 @default.
• W2016440680 hasConcept C32424582 @default.
• W2016440680 hasConcept C43617362 @default.
• W2016440680 hasConcept C512968161 @default.
• W2016440680 hasConcept C56052488 @default.
• W2016440680 hasConcept C75937256 @default.
• W2016440680 hasConcept C8010536 @default.

• next