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- W2016447638 abstract "The electronics industry is relying increasingly on robotics for its production. High accuracy wafer handling is critical in semiconductor manufacturing. Typical pre-alignment wafer eccentricity identification is time-consuming because a pick-measure-place method is used. To improve the wafer handling efficiency, it is necessary to speed up the measurement process or place it in parallel with other operations. Our previous work proposed and implemented dynamic wafer handling methods using optic sensors to replace the pre-alignment methods. Our proposed methods improve the wafer handling efficiency greatly and achieve satisfactory eccentricity identification results. However, the wafer eccentricity estimation with disturbance caused by the wafer notch is not addressed. In this paper, we propose a method to eliminate the disturbance caused by the wafer notch such that the wafer eccentricity identification accuracy can be improved. The proposed method is also compared with the other method. Experiments were performed to validate the proposed method and the results demonstrate the effectiveness of the proposed method." @default.
- W2016447638 created "2016-06-24" @default.
- W2016447638 creator A5004336199 @default.
- W2016447638 creator A5008487801 @default.
- W2016447638 creator A5042509685 @default.
- W2016447638 creator A5055190730 @default.
- W2016447638 date "2013-05-01" @default.
- W2016447638 modified "2023-09-24" @default.
- W2016447638 title "Wafer eccentricity estimation with disturbance caused by alignment notch" @default.
- W2016447638 cites W2027667273 @default.
- W2016447638 cites W2034108993 @default.
- W2016447638 cites W2075678956 @default.
- W2016447638 cites W2155735496 @default.
- W2016447638 cites W1567848620 @default.
- W2016447638 cites W2024778194 @default.
- W2016447638 doi "https://doi.org/10.1109/cyber.2013.6705463" @default.
- W2016447638 hasPublicationYear "2013" @default.
- W2016447638 type Work @default.
- W2016447638 sameAs 2016447638 @default.
- W2016447638 citedByCount "0" @default.
- W2016447638 crossrefType "proceedings-article" @default.
- W2016447638 hasAuthorship W2016447638A5004336199 @default.
- W2016447638 hasAuthorship W2016447638A5008487801 @default.
- W2016447638 hasAuthorship W2016447638A5042509685 @default.
- W2016447638 hasAuthorship W2016447638A5055190730 @default.
- W2016447638 hasConcept C111919701 @default.
- W2016447638 hasConcept C116834253 @default.
- W2016447638 hasConcept C119599485 @default.
- W2016447638 hasConcept C127413603 @default.
- W2016447638 hasConcept C133731056 @default.
- W2016447638 hasConcept C154945302 @default.
- W2016447638 hasConcept C160671074 @default.
- W2016447638 hasConcept C17744445 @default.
- W2016447638 hasConcept C190538878 @default.
- W2016447638 hasConcept C199539241 @default.
- W2016447638 hasConcept C24326235 @default.
- W2016447638 hasConcept C2775924081 @default.
- W2016447638 hasConcept C41008148 @default.
- W2016447638 hasConcept C47446073 @default.
- W2016447638 hasConcept C59822182 @default.
- W2016447638 hasConcept C66018809 @default.
- W2016447638 hasConcept C86803240 @default.
- W2016447638 hasConcept C98045186 @default.
- W2016447638 hasConceptScore W2016447638C111919701 @default.
- W2016447638 hasConceptScore W2016447638C116834253 @default.
- W2016447638 hasConceptScore W2016447638C119599485 @default.
- W2016447638 hasConceptScore W2016447638C127413603 @default.
- W2016447638 hasConceptScore W2016447638C133731056 @default.
- W2016447638 hasConceptScore W2016447638C154945302 @default.
- W2016447638 hasConceptScore W2016447638C160671074 @default.
- W2016447638 hasConceptScore W2016447638C17744445 @default.
- W2016447638 hasConceptScore W2016447638C190538878 @default.
- W2016447638 hasConceptScore W2016447638C199539241 @default.
- W2016447638 hasConceptScore W2016447638C24326235 @default.
- W2016447638 hasConceptScore W2016447638C2775924081 @default.
- W2016447638 hasConceptScore W2016447638C41008148 @default.
- W2016447638 hasConceptScore W2016447638C47446073 @default.
- W2016447638 hasConceptScore W2016447638C59822182 @default.
- W2016447638 hasConceptScore W2016447638C66018809 @default.
- W2016447638 hasConceptScore W2016447638C86803240 @default.
- W2016447638 hasConceptScore W2016447638C98045186 @default.
- W2016447638 hasLocation W20164476381 @default.
- W2016447638 hasOpenAccess W2016447638 @default.
- W2016447638 hasPrimaryLocation W20164476381 @default.
- W2016447638 hasRelatedWork W1592153321 @default.
- W2016447638 hasRelatedWork W1975978721 @default.
- W2016447638 hasRelatedWork W2056511001 @default.
- W2016447638 hasRelatedWork W2060049298 @default.
- W2016447638 hasRelatedWork W2075678956 @default.
- W2016447638 hasRelatedWork W2096148351 @default.
- W2016447638 hasRelatedWork W2123839324 @default.
- W2016447638 hasRelatedWork W2377346893 @default.
- W2016447638 hasRelatedWork W2480791519 @default.
- W2016447638 hasRelatedWork W2611628441 @default.
- W2016447638 hasRelatedWork W2735297981 @default.
- W2016447638 hasRelatedWork W2766178794 @default.
- W2016447638 hasRelatedWork W2798374657 @default.
- W2016447638 hasRelatedWork W2921275420 @default.
- W2016447638 hasRelatedWork W2964833413 @default.
- W2016447638 hasRelatedWork W2098313305 @default.
- W2016447638 hasRelatedWork W2302054834 @default.
- W2016447638 hasRelatedWork W2735532066 @default.
- W2016447638 hasRelatedWork W2771926083 @default.
- W2016447638 hasRelatedWork W2962623051 @default.
- W2016447638 isParatext "false" @default.
- W2016447638 isRetracted "false" @default.
- W2016447638 magId "2016447638" @default.
- W2016447638 workType "article" @default.