Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016451189> ?p ?o ?g. }
Showing items 1 to 82 of
82
with 100 items per page.
- W2016451189 endingPage "2652" @default.
- W2016451189 startingPage "2647" @default.
- W2016451189 abstract "In this paper, plasma based ion implantation of a diamond-shaped target was simulated using a fluid dynamic model for three different sizes. The effects of the target size on plasma sheath evolution and the implanted ion parameters have been studied. It was found that a larger sized target would result in a faster sheath expansion, and better conformity between the sheath and the target. For all three cases, the ion implanting dose peaked near the corner and decreased at the corner, reminiscent of the sheath characteristic around an independent corner." @default.
- W2016451189 created "2016-06-24" @default.
- W2016451189 creator A5007729484 @default.
- W2016451189 creator A5042608294 @default.
- W2016451189 creator A5053598793 @default.
- W2016451189 date "2000-09-29" @default.
- W2016451189 modified "2023-10-18" @default.
- W2016451189 title "Simulation of a diamond-shaped target with different sizes in plasma based ion implantation" @default.
- W2016451189 cites W1973350012 @default.
- W2016451189 cites W1980390908 @default.
- W2016451189 cites W1981701402 @default.
- W2016451189 cites W1985629977 @default.
- W2016451189 cites W2000883276 @default.
- W2016451189 cites W2004539716 @default.
- W2016451189 cites W2015239912 @default.
- W2016451189 cites W2018781192 @default.
- W2016451189 cites W2019853518 @default.
- W2016451189 cites W2036139998 @default.
- W2016451189 cites W2043020840 @default.
- W2016451189 cites W2046892263 @default.
- W2016451189 cites W2058938207 @default.
- W2016451189 cites W2070136887 @default.
- W2016451189 cites W2070369868 @default.
- W2016451189 cites W2075770192 @default.
- W2016451189 cites W2088021290 @default.
- W2016451189 cites W2094678768 @default.
- W2016451189 cites W2094995307 @default.
- W2016451189 cites W2139097664 @default.
- W2016451189 doi "https://doi.org/10.1088/0022-3727/33/20/317" @default.
- W2016451189 hasPublicationYear "2000" @default.
- W2016451189 type Work @default.
- W2016451189 sameAs 2016451189 @default.
- W2016451189 citedByCount "5" @default.
- W2016451189 crossrefType "journal-article" @default.
- W2016451189 hasAuthorship W2016451189A5007729484 @default.
- W2016451189 hasAuthorship W2016451189A5042608294 @default.
- W2016451189 hasAuthorship W2016451189A5053598793 @default.
- W2016451189 hasConcept C105812681 @default.
- W2016451189 hasConcept C121332964 @default.
- W2016451189 hasConcept C145148216 @default.
- W2016451189 hasConcept C159985019 @default.
- W2016451189 hasConcept C178790620 @default.
- W2016451189 hasConcept C184779094 @default.
- W2016451189 hasConcept C185592680 @default.
- W2016451189 hasConcept C192562407 @default.
- W2016451189 hasConcept C2776921476 @default.
- W2016451189 hasConcept C41823505 @default.
- W2016451189 hasConcept C62520636 @default.
- W2016451189 hasConcept C82706917 @default.
- W2016451189 hasConceptScore W2016451189C105812681 @default.
- W2016451189 hasConceptScore W2016451189C121332964 @default.
- W2016451189 hasConceptScore W2016451189C145148216 @default.
- W2016451189 hasConceptScore W2016451189C159985019 @default.
- W2016451189 hasConceptScore W2016451189C178790620 @default.
- W2016451189 hasConceptScore W2016451189C184779094 @default.
- W2016451189 hasConceptScore W2016451189C185592680 @default.
- W2016451189 hasConceptScore W2016451189C192562407 @default.
- W2016451189 hasConceptScore W2016451189C2776921476 @default.
- W2016451189 hasConceptScore W2016451189C41823505 @default.
- W2016451189 hasConceptScore W2016451189C62520636 @default.
- W2016451189 hasConceptScore W2016451189C82706917 @default.
- W2016451189 hasIssue "20" @default.
- W2016451189 hasLocation W20164511891 @default.
- W2016451189 hasOpenAccess W2016451189 @default.
- W2016451189 hasPrimaryLocation W20164511891 @default.
- W2016451189 hasRelatedWork W1617534506 @default.
- W2016451189 hasRelatedWork W1981954100 @default.
- W2016451189 hasRelatedWork W2075988464 @default.
- W2016451189 hasRelatedWork W2091949762 @default.
- W2016451189 hasRelatedWork W2144642093 @default.
- W2016451189 hasRelatedWork W3040943442 @default.
- W2016451189 hasRelatedWork W3105952714 @default.
- W2016451189 hasRelatedWork W3186290646 @default.
- W2016451189 hasRelatedWork W4362663149 @default.
- W2016451189 hasRelatedWork W2083108293 @default.
- W2016451189 hasVolume "33" @default.
- W2016451189 isParatext "false" @default.
- W2016451189 isRetracted "false" @default.
- W2016451189 magId "2016451189" @default.
- W2016451189 workType "article" @default.