FRINK Linked Data Fragments server

Matches in SemOpenAlex for { <https://semopenalex.org/work/W2016482220> ?p ?o ?g. }

• W2016482220 endingPage "582" @default.
• W2016482220 startingPage "559" @default.
• W2016482220 abstract "Laser recrystallized silicon-on-oxide, graphite strip heater recrystallized silicon-on-oxide and buried oxide by high dose oxygen ion implantation are three of the silicon-on-insulator technologies that are currently being evaluated for VLSI and VHSIC applications. This status report compares the microstructure of these materials. The main defects in both the laser and graphite strip heater recrystallized material are subgrain boundaries. The misorientations across the boundaries are normally less than one degree. The boundaries are formed by dislocation coalescence. The dislocations are generated by the stresses caused by the volume expansion during solidification of silicon droplets trapped in the solid silicon matrix. The droplets are caused by constitutional supercooling. Buried oxide SOI formed by high dose oxygen ion implantation has fewer crystallographic defects than the other two materials. The entire ion implanted area is a single crystal after high temperature annealing. The primary defects in epitaxial layers grown on implanted substrates are dislocations. The oxide/silicon interfaces are abrupt if the dose is large enough. The sharp interfaces are formed by an internal oxidation mechanism. The minimum MeV He ion channeling yield from epitaxial silicon layers grown on buried oxide is about 2.5%, the lowest of any SOI material." @default.
• W2016482220 created "2016-06-24" @default.
• W2016482220 creator A5060761978 @default.
• W2016482220 date "1983-10-01" @default.
• W2016482220 modified "2023-10-18" @default.
• W2016482220 title "Microstructural defects in laser recrystallized, graphite strip heater recrystallized and buried oxide silicon-on-insulator systems: A status report" @default.
• W2016482220 cites W1973734161 @default.
• W2016482220 cites W1975324143 @default.
• W2016482220 cites W1982635368 @default.
• W2016482220 cites W1982843384 @default.
• W2016482220 cites W1987519976 @default.
• W2016482220 cites W1988177708 @default.
• W2016482220 cites W1990919014 @default.
• W2016482220 cites W1992460126 @default.
• W2016482220 cites W2002067634 @default.
• W2016482220 cites W2002408528 @default.
• W2016482220 cites W2024191721 @default.
• W2016482220 cites W2025681561 @default.
• W2016482220 cites W2034364801 @default.
• W2016482220 cites W2043817349 @default.
• W2016482220 cites W2044821352 @default.
• W2016482220 cites W2047482405 @default.
• W2016482220 cites W2053049994 @default.
• W2016482220 cites W2058898289 @default.
• W2016482220 cites W2063838411 @default.
• W2016482220 cites W2067014378 @default.
• W2016482220 cites W2069489776 @default.
• W2016482220 cites W2070189789 @default.
• W2016482220 cites W2078732020 @default.
• W2016482220 cites W2080856527 @default.
• W2016482220 cites W2086748562 @default.
• W2016482220 cites W2087181295 @default.
• W2016482220 cites W2089872479 @default.
• W2016482220 cites W2092198267 @default.
• W2016482220 cites W2107520849 @default.
• W2016482220 cites W2123225159 @default.
• W2016482220 cites W2128361944 @default.
• W2016482220 cites W2129130421 @default.
• W2016482220 cites W2313374438 @default.
• W2016482220 cites W2323432848 @default.
• W2016482220 cites W2330125328 @default.
• W2016482220 cites W4255385742 @default.
• W2016482220 cites W4375931966 @default.
• W2016482220 cites W2035132190 @default.
• W2016482220 doi "https://doi.org/10.1016/0022-0248(83)90168-9" @default.
• W2016482220 hasPublicationYear "1983" @default.
• W2016482220 type Work @default.
• W2016482220 sameAs 2016482220 @default.
• W2016482220 citedByCount "58" @default.
• W2016482220 crossrefType "journal-article" @default.
• W2016482220 hasAuthorship W2016482220A5060761978 @default.
• W2016482220 hasConcept C110738630 @default.
• W2016482220 hasConcept C145148216 @default.
• W2016482220 hasConcept C151730666 @default.
• W2016482220 hasConcept C159985019 @default.
• W2016482220 hasConcept C164675345 @default.
• W2016482220 hasConcept C178790620 @default.
• W2016482220 hasConcept C185592680 @default.
• W2016482220 hasConcept C191897082 @default.
• W2016482220 hasConcept C192562407 @default.
• W2016482220 hasConcept C195702682 @default.
• W2016482220 hasConcept C2777855556 @default.
• W2016482220 hasConcept C2779227376 @default.
• W2016482220 hasConcept C2779698641 @default.
• W2016482220 hasConcept C2779851234 @default.
• W2016482220 hasConcept C41823505 @default.
• W2016482220 hasConcept C47908070 @default.
• W2016482220 hasConcept C49040817 @default.
• W2016482220 hasConcept C53143962 @default.
• W2016482220 hasConcept C544956773 @default.
• W2016482220 hasConcept C8010536 @default.
• W2016482220 hasConcept C86803240 @default.
• W2016482220 hasConcept C87976508 @default.
• W2016482220 hasConceptScore W2016482220C110738630 @default.
• W2016482220 hasConceptScore W2016482220C145148216 @default.
• W2016482220 hasConceptScore W2016482220C151730666 @default.
• W2016482220 hasConceptScore W2016482220C159985019 @default.
• W2016482220 hasConceptScore W2016482220C164675345 @default.
• W2016482220 hasConceptScore W2016482220C178790620 @default.
• W2016482220 hasConceptScore W2016482220C185592680 @default.
• W2016482220 hasConceptScore W2016482220C191897082 @default.
• W2016482220 hasConceptScore W2016482220C192562407 @default.
• W2016482220 hasConceptScore W2016482220C195702682 @default.
• W2016482220 hasConceptScore W2016482220C2777855556 @default.
• W2016482220 hasConceptScore W2016482220C2779227376 @default.
• W2016482220 hasConceptScore W2016482220C2779698641 @default.
• W2016482220 hasConceptScore W2016482220C2779851234 @default.
• W2016482220 hasConceptScore W2016482220C41823505 @default.
• W2016482220 hasConceptScore W2016482220C47908070 @default.
• W2016482220 hasConceptScore W2016482220C49040817 @default.
• W2016482220 hasConceptScore W2016482220C53143962 @default.
• W2016482220 hasConceptScore W2016482220C544956773 @default.
• W2016482220 hasConceptScore W2016482220C8010536 @default.
• W2016482220 hasConceptScore W2016482220C86803240 @default.
• W2016482220 hasConceptScore W2016482220C87976508 @default.
• W2016482220 hasIssue "3" @default.
• W2016482220 hasLocation W20164822201 @default.
• W2016482220 hasOpenAccess W2016482220 @default.

• next